Document Control¶

Document Identification¶

Property	Value
Document Title	SECS/GEM Interface Manual
Document Number	SECSGEM-IF-001
Document Type	Interface Specification
Security Classification	Confidential

Document Properties¶

Property	Description
Equipment Model	[Equipment Model Name]
Equipment Supplier	Gathertech Co., Ltd.
Customer	[Customer Name]
Project Code	[Project Code]
GEM Compliance	SEMI E30.8-0817 (GEM)
GEM 300 Compliance	SEMI E30.8-0817, E40, E87, E90, E94, E116
HSMS Compliance	SEMI E37.1-0109

Revision History¶

Rev	Date	Author	Description	Reviewer	Approved
1.0	[Date]	[Author]	Initial Release	[Reviewer]	[Approver]
1.1	[Date]	[Author]	Added GEM 300 sections	[Reviewer]	[Approver]

Document Approval¶

Role	Name	Signature	Date
Prepared By	[Author Name]	______	__
Technical Review	[Reviewer Name]	______	__
Quality Review	[QA Name]	______	__
Customer Approval	[Customer Rep]	______	__
Final Approval	[Manager Name]	______	__

Approval Required

This document is not valid until all required signatures are obtained. Electronic signatures are acceptable per company document control procedures.

Distribution List¶

Copy	Holder	Department / Organization	Format	Date Issued
01	[Name]	[Company] Engineering	PDF	[Date]
02	[Name]	[Customer] Integration	PDF	[Date]
03	[Name]	[Company] Quality	PDF	[Date]
04	[Name]	[Customer] MES Team	PDF	[Date]
Master	Document Control	[Company]	Original	[Date]

Referenced Documents¶

Document ID	Title	Version
SEMI E4-0699	SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)	0699
SEMI E5-0712	SEMI Equipment Communications Standard 2 Message Content (SECS-II)	0712
SEMI E30.8-0817	Generic Model for Communications and Control of Manufacturing Equipment (GEM)	0817
SEMI E37.1-0109	High-Speed SECS Message Services (HSMS) Generic Services	0109
SEMI E40-0218	Standard for Processing Management	0218
SEMI E87.7-0418	Specification for Carrier Management (CMS)	0418
SEMI E90-1115	Specification for Substrate Tracking	1115
SEMI E94-0218	Specification for Control Job Management	0218

Document Change Request Process¶

flowchart LR A[Change Request] --> B{Technical Review} B -->|Approved| C[Document Update] B -->|Rejected| D[Notify Requester] C --> E{Customer Review} E -->|Approved| F[Release New Version] E -->|Changes Required| C F --> G[Distribute to Holders]

Change Request Procedure¶

Submit Request: Complete Change Request Form (CRF) with detailed description
Technical Review: Engineering team evaluates impact and feasibility
Customer Notification: Notify customer of proposed changes (if applicable)
Document Update: Implement approved changes with tracked revisions
Review Cycle: Technical and quality review of updated document
Approval: Obtain required signatures per approval matrix
Release: Assign new version number and release date
Distribution: Distribute to all registered document holders

Document Control Information¶

Master Document Location¶

Location	Path / URL
Electronic Master	[SharePoint/Server Path]
Web Version	[Internal URL]
Physical Master	Document Control Archive

Document Owner¶

Role	Name	Email
Document Owner	[Name]	[email]
Technical Contact	[Name]	[email]
Document Control	[Name]	[email]

Confidentiality Notice¶

Confidential Document

This document contains proprietary and confidential information belonging to Gathertech Co., Ltd..

The information contained herein is provided solely for use by authorized personnel in connection with the implementation and support of the equipment interface.

Restrictions:

Reproduction or distribution without written authorization is prohibited
Information may not be disclosed to third parties
All copies must be returned or destroyed upon project completion
Violation may result in legal action

Document Control Standards¶

This document is controlled under the company's internal document management procedures to ensure version consistency and traceability.