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SECS/GEM Interface Manual

SEMI E30.8 Compliant

SECS/GEM Interface
Specification

Enterprise-grade equipment communication platform for semiconductor and panel display manufacturing

Panel Display Equipment
100% GEM Compliant
12+ SECS Streams
100+ Variables
80+ Events

Who This Is For

Intended Audience

This manual is written for semiconductor and panel display equipment integrators, process engineers, and host system developers working with SECS/GEM protocols.

🔧
Integration Engineers
Implementing HOST-side or Equipment-side SECS/GEM interfaces in fab MES, SCADA, or equipment control systems.
🏭
Equipment Manufacturers
Designing SECS/GEM-compliant equipment and verifying GEM 200 / GEM 300 compliance against SEMI standards.
📐
Technical Buyers & Evaluators
Evaluating Gather System Technology's SECS/GEM implementation capability for project bidding and partnership consideration.

Quick Start

Choose your starting point based on your goal:

📄
Browse Message Definitions
Jump into SECS-II message format reference across 10+ streams.

Message Reference →

✅
Check GEM Compliance
Review the complete SEMI E30 compliance matrix with all supported capabilities.

Compliance Matrix →

🎯
See Implementation Scenarios
Walk through real-world message sequences: communication setup, recipe flow, carrier handling.

View Scenarios →

⚖️
Read the Disclaimer
Understand the legal terms, template nature of this document, and how it relates to customer deliveries.

Disclaimer →

Technical Capabilities

🔗
HSMS
High-Speed Protocol
⚙️
5+
State Models
🔔
100+
Alarm Definitions
📄
PP
Recipe Management

Core Modules

🔗
HSMS Communication
High-Speed SECS Message Services with configurable timers (T3-T8), multi-session support, automatic reconnection, and robust error handling.
View Configuration →
⚙️
State Management
Complete state models including Control State (Online/Offline), Processing State, and Spooling with full transition tables and sequence diagrams.
Explore States →
📊
Data Collection
Comprehensive variable system with Status Variables (SV), Equipment Constants (EC), Data Variables (DV), and real-time event reporting via S6F11.
View Variables →
📋
Recipe Management
Full Process Program management with S7 stream support for upload, download, verification, deletion, and host-managed recipe execution control.
Learn More →

SEMI Standards

E5
SECS-II Message
E30
GEM Standard
E37
HSMS Protocol
E40
Process Job
E87
Carrier Mgmt
E90
Substrate Track
E94
Control Job
E116
EPT Services

GEM 200 Features

Feature Description Status
GEM Compliance Complete SEMI E30 compliance matrix with all capabilities Supported
Control State Online/Offline/Local/Remote state management Required
Processing State Equipment processing lifecycle management Required
Spooling Message spooling during communication loss Supported
Variables 100+ SV, EC, DV definitions Required
Collection Events 80+ events with configurable reports Required
Alarms 8 categories, 100+ alarm definitions Required
Remote Commands Host-initiated equipment control via S2F41 Required
Process Program Recipe upload/download management Required

GEM 300 Extensions

Feature Standard Description Status
Carrier Management E87 FOUP/cassette handling and state tracking Supported
Load Port Control E87 Load port state and access management Supported
Access Mode E87 Manual/Auto access control Supported
Process Job E40 Process job lifecycle management Supported
Control Job E94 Control job scheduling and execution Supported
Substrate Tracking E90 Individual substrate location tracking Supported
Terminal Services E116 Operator terminal messaging Supported

Message Scenarios

🤝
Communication Establishment
Complete HSMS connection sequence through S1F13/F14 establishment and S1F17/F18 online transition.
View Scenario →
📥
Recipe Management
Recipe download, upload, and verification flows with complete S7F1-F26 message sequences.
View Scenario →
▶️
Process Execution
Host-initiated process control with S2F41 remote commands and S6F11 event reporting.
View Scenario →
📦
Carrier Handling
Complete carrier lifecycle from arrival through slot mapping and departure with E87 compliance.
View Scenario →

Communication Architecture

sequenceDiagram participant Host participant Equipment rect rgba(6, 182, 212, 0.1) Note over Host,Equipment: HSMS Layer Host->>Equipment: TCP Connect (Port 5000) Host->>Equipment: Select.req Equipment-->>Host: Select.rsp (Status=0) end rect rgba(59, 130, 246, 0.1) Note over Host,Equipment: SECS-II Layer Host->>Equipment: S1F13 W (Establish Comm) Equipment-->>Host: S1F14 (COMMACK=0) Host->>Equipment: S1F17 W (Request Online) Equipment-->>Host: S1F18 (ONLACK=0) end rect rgba(139, 92, 246, 0.1) Note over Host,Equipment: GEM Operations Host->>Equipment: S2F41 W (Remote Command) Equipment-->>Host: S2F42 (HCACK=0) Equipment->>Host: S6F11 W (Event Report) Host-->>Equipment: S6F12 (ACKC6=0) end

Technology Stack

🌐 TCP/IP
↔️ HSMS
{ } SECS-II
⚙️ GEM
📦 E87 CMS
📋 E40/E94

Document Info

Property Value
Document ID SECSGEM-IF-001
Version 1.0
GEM Standard SEMI E30.8-0817
HSMS Standard SEMI E37.1-0109
Status Released

Conventions

Symbol Meaning
S1F1 SECS-II Stream 1, Function 1
<L> List data type
<A> ASCII string
<U4> Unsigned 4-byte integer
<B> Binary data
<F4> 4-byte floating point
H→E Host to Equipment
E→H Equipment to Host
W Wait bit (reply expected)

Status Indicators

  • Required — Mandatory per SEMI standard
  • Supported — Implemented feature
  • Optional — Available on request
  • New — Recently added

About This Manual

Generic Template Notice

This website publishes the public generic template of Gather System Technology's SECS/GEM Interface Specification. It is shared for technical reference, knowledge contribution to the semiconductor community, and as a demonstration of our implementation methodology.

Placeholder fields marked with {EQUIPMENT_MODEL} or similar notation in the technical chapters are intentionally unfilled. In actual customer deliveries, these are customized per project with specific equipment models, software versions, and compliance statements.

Example values (e.g., GST-SECSGEM-Reference, GST-SGM-REF-2026) shown in cover pages are illustrative only and do not represent real products.

For full legal terms, governing law, SEMI standards attribution, and copyright details, see the Disclaimer.

Contact
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Legal Inquiries legal@gathertech.com.tw

Gather System Technology (程邦系統科技有限公司) Semiconductor & Panel Display Equipment Integration https://www.gathertech.com.tw

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Public generic template. See Disclaimer for legal terms.