SECS/GEM Interface Manual¶
SEMI E30.8 Compliant
SECS/GEM Interface
Specification
Enterprise-grade equipment communication platform for semiconductor and panel display manufacturing
Panel Display Equipment
100%
GEM Compliant
12+
SECS Streams
100+
Variables
80+
Events
Technical Capabilities¶
HSMS
High-Speed Protocol
5+
State Models
100+
Alarm Definitions
PP
Recipe Management
Core Modules¶
HSMS Communication
High-Speed SECS Message Services with configurable timers (T3-T8), multi-session support, automatic reconnection, and robust error handling.
View Configuration →
State Management
Complete state models including Control State (Online/Offline), Processing State, and Spooling with full transition tables and sequence diagrams.
Explore States →
Data Collection
Comprehensive variable system with Status Variables (SV), Equipment Constants (EC), Data Variables (DV), and real-time event reporting via S6F11.
View Variables →
Recipe Management
Full Process Program management with S7 stream support for upload, download, verification, deletion, and host-managed recipe execution control.
Learn More →
SEMI Standards¶
E5
SECS-II Message
E30
GEM Standard
E37
HSMS Protocol
E40
Process Job
E87
Carrier Mgmt
E90
Substrate Track
E94
Control Job
E116
EPT Services
GEM 200 Features¶
| Feature | Description | Status |
|---|---|---|
| GEM Compliance | Complete SEMI E30 compliance matrix with all capabilities | Supported |
| Control State | Online/Offline/Local/Remote state management | Required |
| Processing State | Equipment processing lifecycle management | Required |
| Spooling | Message spooling during communication loss | Supported |
| Variables | 100+ SV, EC, DV definitions | Required |
| Collection Events | 80+ events with configurable reports | Required |
| Alarms | 8 categories, 100+ alarm definitions | Required |
| Remote Commands | Host-initiated equipment control via S2F41 | Required |
| Process Program | Recipe upload/download management | Required |
GEM 300 Extensions¶
| Feature | Standard | Description | Status |
|---|---|---|---|
| Carrier Management | E87 | FOUP/cassette handling and state tracking | Supported |
| Load Port Control | E87 | Load port state and access management | Supported |
| Access Mode | E87 | Manual/Auto access control | Supported |
| Process Job | E40 | Process job lifecycle management | Supported |
| Control Job | E94 | Control job scheduling and execution | Supported |
| Substrate Tracking | E90 | Individual substrate location tracking | Supported |
| Terminal Services | E116 | Operator terminal messaging | Supported |
Message Scenarios¶
Communication Establishment
Complete HSMS connection sequence through S1F13/F14 establishment and S1F17/F18 online transition.
View Scenario →
Recipe Management
Recipe download, upload, and verification flows with complete S7F1-F26 message sequences.
View Scenario →
Process Execution
Host-initiated process control with S2F41 remote commands and S6F11 event reporting.
View Scenario →
Carrier Handling
Complete carrier lifecycle from arrival through slot mapping and departure with E87 compliance.
View Scenario →
Communication Architecture¶
sequenceDiagram
participant Host
participant Equipment
rect rgba(6, 182, 212, 0.1)
Note over Host,Equipment: HSMS Layer
Host->>Equipment: TCP Connect (Port 5000)
Host->>Equipment: Select.req
Equipment-->>Host: Select.rsp (Status=0)
end
rect rgba(59, 130, 246, 0.1)
Note over Host,Equipment: SECS-II Layer
Host->>Equipment: S1F13 W (Establish Comm)
Equipment-->>Host: S1F14 (COMMACK=0)
Host->>Equipment: S1F17 W (Request Online)
Equipment-->>Host: S1F18 (ONLACK=0)
end
rect rgba(139, 92, 246, 0.1)
Note over Host,Equipment: GEM Operations
Host->>Equipment: S2F41 W (Remote Command)
Equipment-->>Host: S2F42 (HCACK=0)
Equipment->>Host: S6F11 W (Event Report)
Host-->>Equipment: S6F12 (ACKC6=0)
end
Technology Stack¶
TCP/IP
HSMS
SECS-II
GEM
E87 CMS
E40/E94
Document Info¶
| Property | Value |
|---|---|
| Document ID | SECSGEM-IF-001 |
| Version | 1.0 |
| GEM Standard | SEMI E30.8-0817 |
| HSMS Standard | SEMI E37.1-0109 |
| Status | Released |
Conventions¶
| Symbol | Meaning |
|---|---|
S1F1 |
SECS-II Stream 1, Function 1 |
<L> |
List data type |
<A> |
ASCII string |
<U4> |
Unsigned 4-byte integer |
<B> |
Binary data |
<F4> |
4-byte floating point |
| H→E | Host to Equipment |
| E→H | Equipment to Host |
| W | Wait bit (reply expected) |
Status Indicators¶
- Required — Mandatory per SEMI standard
- Supported — Implemented feature
- Optional — Available on request
- New — Recently added
Contact¶
| Technical Support | support@gathertech.com.tw |
| Sales | sales@gathertech.com.tw |
| Documentation | docs@gathertech.com.tw |
Gathertech Co., Ltd. Semiconductor & Panel Display Equipment Integration
Gathertech Co., Ltd.
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