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Overview

1. Purpose

This document defines the SECS/GEM interface specification for the [Equipment Model Name]. It provides complete information required for host system integration, including:

  • Communication configuration
  • GEM capability compliance
  • Variable definitions (Status Variables, Equipment Constants, Data Variables)
  • Collection Events and associated reports
  • Alarm definitions
  • Remote command specifications
  • SECS-II message formats

2. Scope

This specification applies to:

  • Equipment Model: [Equipment Model Name]
  • Software Version: [Version Number]
  • GEM Compliance Level: SEMI E30 / SEMI E30.x (GEM 300)

2.1 GEM 200 Features

Feature Supported
State Models Yes
Host Initiated S1,F13/F14 Scenario Yes
Equipment Initiated S1,F13/F14 Scenario Yes
Equipment Constants Yes
Status Variable Yes
Data Collection / Trace Yes
Alarm Management Yes
Remote Control Yes
Process Program Management Yes
Spooling Yes
Control State Model Yes

2.2 GEM 300 Features (if applicable)

Feature SEMI Standard Supported
Carrier Management E87 (CMS) [Yes/No]
Process Job Management E40 (PJM) [Yes/No]
Control Job Management E94 (CJM) [Yes/No]
Substrate Tracking E90 [Yes/No]
Equipment Terminal Services E116 (ETS) [Yes/No]

3. Referenced Standards

Standard Title Edition
SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Latest
SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS-II) Latest
SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) Latest
SEMI E37 High-Speed SECS Message Services (HSMS) Generic Services Latest
SEMI E37.1 High-Speed SECS Message Services Single-Session Mode (HSMS-SS) Latest
SEMI E40 Standard for Processing Management Latest
SEMI E87 Specification for Carrier Management (CMS) Latest
SEMI E90 Specification for Substrate Tracking Latest
SEMI E94 Specification for Control Job Management Latest
SEMI E116 Specification for Equipment Performance Tracking Latest

4. Terminology and Abbreviations

Term Definition
CE Collection Event
CJ Control Job
CMS Carrier Management System
DV Data Variable
EC Equipment Constant
EQP Equipment
GEM Generic Equipment Model
HSMS High-Speed SECS Message Services
PJ Process Job
PP Process Program (Recipe)
RPTID Report ID
SECS SEMI Equipment Communications Standard
SV Status Variable
VID Variable ID

5. Document Structure

Chapter Content
1-2 Document Control, Overview
3-4 Communication Configuration, Communication State
5 GEM Compliance Statement
6-8 State Models (Control, Processing, Spooling)
9-13 Variables, Events, Alarms, Commands, Process Program
14+ Message Scenarios
20+ GEM 300 Extensions
Appendix Message Reference, Data Items, Error Codes