Appendix C - Glossary¶
A¶
ALCD - Alarm Code. A code indicating alarm category and set/clear status.
ALID - Alarm ID. Unique identifier for an alarm.
ALTX - Alarm Text. Human-readable description of an alarm.
AMHS - Automated Material Handling System. Automated transport system for carriers/FOUPs.
C¶
CE - Collection Event. An event that triggers data collection and reporting.
CEID - Collection Event ID. Unique identifier for a collection event.
CJ - Control Job. High-level job that manages process jobs (E94).
CJM - Control Job Management. SEMI E94 standard for control job management.
CMS - Carrier Management System. SEMI E87 standard for carrier management.
COMMACK - Communication Acknowledge. Response code for communication establishment.
D¶
DATAID - Data ID. Unique identifier for a data transaction.
DV - Data Variable. Variable containing process data.
DVVAL - Data Variable Value.
E¶
EAC - Equipment Acknowledge Code. Response for equipment constant changes.
EC - Equipment Constant. Configurable equipment parameter.
ECID - Equipment Constant ID. Unique identifier for an equipment constant.
ECV - Equipment Constant Value.
ETS - Equipment Terminal Services. SEMI E116 standard.
F¶
FOUP - Front Opening Unified Pod. Standard carrier for 300mm wafers.
FOSB - Front Opening Shipping Box. Carrier for wafer shipping.
G¶
GEM - Generic Equipment Model. SEMI E30 standard for equipment communication.
GEM 200 - GEM standard implementation for 200mm wafer equipment.
GEM 300 - Extended GEM standards for 300mm wafer equipment.
H¶
HCACK - Host Command Acknowledge. Response code for remote commands.
HSMS - High-Speed SECS Message Services. TCP/IP based transport protocol (E37).
HSMS-SS - HSMS Single-Session. Single connection mode of HSMS.
L¶
LP - Load Port. Position where carriers are loaded/unloaded.
LRACK - Link Report Acknowledge. Response for linking reports to events.
M¶
MDLN - Model Name. Equipment model identifier.
MES - Manufacturing Execution System. Factory control system.
O¶
OBJACK - Object Acknowledge. Response code for object service operations.
OFLACK - Offline Acknowledge. Response for offline request.
ONLACK - Online Acknowledge. Response for online request.
P¶
PJ - Process Job. Job that defines processing of substrates (E40).
PJM - Process Job Management. SEMI E40 standard.
PP - Process Program. Recipe.
PPBODY - Process Program Body. Recipe data content.
PPID - Process Program ID. Recipe identifier.
R¶
RCMD - Remote Command. Command sent from host to equipment.
RPTID - Report ID. Unique identifier for a report definition.
S¶
SECS - SEMI Equipment Communications Standard.
SECS-I - SECS serial communication protocol (E4).
SECS-II - SECS message content standard (E5).
SEMI - Semiconductor Equipment and Materials International.
SOFTREV - Software Revision. Equipment software version.
SV - Status Variable. Read-only equipment status value.
SVID - Status Variable ID. Unique identifier for a status variable.
T¶
T3 - Reply Timeout. Time to wait for message reply.
T5 - Connection Separation Time. Time between connection attempts.
T6 - Control Transaction Timeout. Time for HSMS control messages.
T7 - Not Selected Timeout. Time in not-selected state.
T8 - Network Intercharacter Timeout. Character reception timeout.
TID - Terminal ID. Identifier for operator terminal.
V¶
VID - Variable ID. Generic identifier for any variable type.
SEMI Standards Reference¶
| Standard | Title |
|---|---|
| SEMI E4 | SECS-I Message Transfer |
| SEMI E5 | SECS-II Message Content |
| SEMI E30 | GEM (Generic Equipment Model) |
| SEMI E37 | HSMS Generic Services |
| SEMI E37.1 | HSMS Single-Session |
| SEMI E39 | Object Services |
| SEMI E40 | Process Job Management |
| SEMI E87 | Carrier Management (CMS) |
| SEMI E90 | Substrate Tracking |
| SEMI E94 | Control Job Management |
| SEMI E116 | Equipment Performance Tracking |
Message Direction Notation¶
| Symbol | Meaning |
|---|---|
| H→E | Host to Equipment |
| E→H | Equipment to Host |
| H↔E | Bidirectional |
| W | Wait bit (reply expected) |
State Abbreviations¶
| Abbreviation | Full Name |
|---|---|
| CTRL | Control State |
| COMM | Communication State |
| PROC | Processing State |
| LP | Load Port |
| PM | Process Module |
| TM | Transfer Module |