GEM Compliance Statement¶

1. Overview¶

This chapter documents the GEM (SEMI E30) compliance status for [Equipment Model Name]. The compliance matrix below indicates support for each GEM fundamental requirement and additional capability.

2. GEM Compliance Summary¶

Category	Compliance Level
Fundamental Requirements	Full Compliance
Additional Capabilities	See matrix below
State Models	SEMI E30 Compliant

3. Fundamental Requirements Compliance Matrix¶

#	Capability	Status	Notes
1	State Models	Supported	Control State, Processing State
2	Host-Initiated S1,F13/F14 Scenario	Supported
3	Event Notification	Supported	S6F11/F12
4	On-Line Identification	Supported	S1F1/F2
5	Error Messages	Supported	S9Fx
6	Documentation	Supported	This document
7	Control (Operator Initiated)	Supported	S1F15/F16, S1F17/F18

4. Additional Capabilities Compliance Matrix¶

#	Capability	Status	Notes
8	Establish Communication	Supported	Equipment-initiated S1F13/F14
9	Dynamic Event Report Configuration	Supported	S2F33-F36
10	Variable Data Collection	Supported	S1F3/F4, S6F15/F16
11	Trace Data Collection	Supported	S2F23/F24, S6F1/F2
12	Status Data Collection	Supported	S1F3/F4
13	Alarm Management	Supported	S5F1-F8
14	Remote Control	Supported	S2F41/F42
15	Equipment Constants	Supported	S2F13-F16, S2F29/F30
16	Process Program Management	Supported	S7F1-F6, S7F17-F20
17	Material Movement	`[Supported/Not Supported]`	S3Fx
18	Equipment Terminal Services	`[Supported/Not Supported]`	S10Fx
19	Clock	Supported	S2F17/F18, S2F31/F32
20	Limits Monitoring	`[Supported/Not Supported]`	S2F45-F48
21	Spooling	Supported	S2F43/F44
22	Control (Host Initiated)	Supported	S1F15-F18

5. State Model Compliance¶

5.1 Control State Model¶

State	Supported	Notes
OFF-LINE	Yes	Equipment Off-Line sub-states supported
ON-LINE LOCAL	Yes	Operator control mode
ON-LINE REMOTE	Yes	Host control mode

5.2 Processing State Model¶

State	Supported	Notes
IDLE	Yes	Ready for process
INIT	Yes	Initialization
EXECUTING	Yes	Processing
PAUSE	Yes	Temporarily paused
ABORTING	Yes	Abort in progress

6. Supported SECS-II Streams¶

Stream	Description	Supported Messages
S1	Equipment Status	F1-F4, F11-F18
S2	Equipment Control	F13-F18, F23-F24, F29-F42
S5	Alarm Management	F1-F8
S6	Data Collection	F1-F2, F11-F16
S7	Process Program	F1-F6, F17-F20, F23-F26
S9	System Errors	F1, F3, F5, F7, F9, F11, F13
S10	Terminal Services	`[F1-F10]`

7. GEM 300 Compliance (if applicable)¶

Standard	Feature	Status
SEMI E40	Process Job Management (PJM)	`[Supported/Not Supported]`
SEMI E87	Carrier Management (CMS)	`[Supported/Not Supported]`
SEMI E90	Substrate Tracking	`[Supported/Not Supported]`
SEMI E94	Control Job Management (CJM)	`[Supported/Not Supported]`
SEMI E116	Equipment Performance Tracking	`[Supported/Not Supported]`

8. Implementation Notes¶

8.1 Multi-Block Messages¶

Equipment supports multi-block message transfer
Maximum message size: [1048576] bytes
S1F1/F2 inquire supported

8.2 Timeout Configuration¶

All GEM-related timeouts are configurable through Equipment Constants (EC).

8.3 Default Report Definitions¶

Equipment provides predefined report templates that can be modified through dynamic event report configuration (S2F33-F36).