Processing State Model

1. Overview

The Processing State Model defines the equipment's operational states during material processing as specified in SEMI E30 (GEM). This model is equipment-specific and may be customized based on the actual processing capabilities.

2. State Diagram

stateDiagram-v2 [*] --> INIT INIT --> IDLE: Initialization Complete IDLE --> SETTING_UP: Start Command SETTING_UP --> READY: Setup Complete SETTING_UP --> IDLE: Setup Failed/Abort READY --> EXECUTING: Material Ready / Start READY --> IDLE: Abort EXECUTING --> PAUSING: Pause Command PAUSING --> PAUSED: Pause Complete PAUSED --> EXECUTING: Resume Command PAUSED --> ABORTING: Abort Command EXECUTING --> ABORTING: Abort Command ABORTING --> IDLE: Abort Complete EXECUTING --> IDLE: Process Complete

3. State Definitions

State	Description
INIT	Equipment is initializing. Not ready for operations.
IDLE	Equipment is ready and waiting. No processing in progress.
SETTING UP	Equipment is preparing for process (recipe loading, parameter setup).
READY	Equipment is ready to begin processing. Waiting for material or start.
EXECUTING	Equipment is actively processing material.
PAUSING	Equipment is in the process of pausing.
PAUSED	Equipment has paused processing. Can resume or abort.
ABORTING	Equipment is aborting the current process.

4. Transition Table

#	Current State	Trigger	Next State	Action	Related RCMD
1	INIT	Initialization complete	IDLE	Report ready	-
2	IDLE	START command	SETTING UP	Load recipe, setup	START
3	SETTING UP	Setup complete	READY	Wait for process	-
4	SETTING UP	Setup failed	IDLE	Report error	-
5	SETTING UP	ABORT command	IDLE	Cancel setup	ABORT
6	READY	Material present / START	EXECUTING	Begin process	-
7	READY	ABORT command	IDLE	Cancel process	ABORT
8	EXECUTING	Process complete	IDLE	Report completion	-
9	EXECUTING	PAUSE command	PAUSING	Begin pause	PAUSE
10	EXECUTING	ABORT command	ABORTING	Begin abort	ABORT
11	PAUSING	Pause complete	PAUSED	Wait for resume	-
12	PAUSED	RESUME command	EXECUTING	Continue process	RESUME
13	PAUSED	ABORT command	ABORTING	Begin abort	ABORT
14	ABORTING	Abort complete	IDLE	Report abort	-

5. State-Specific Behavior

5.1 INIT State

During initialization: - Equipment performs self-test - Hardware initialization - Recipe library loading - Communication establishment

5.2 IDLE State

In IDLE state: - Equipment is ready to accept commands - Material handling available - Recipe upload/download available - All status queries available

5.3 EXECUTING State

During execution: - Process steps are being performed - Data collection active - Certain commands may be restricted - Abort and Pause commands available

5.4 PAUSED State

When paused: - Process is temporarily halted at a safe point - Equipment maintains current state - Resume will continue from pause point - Abort will terminate process

6. Related Remote Commands

RCMD	Description	Valid States
START	Start processing	IDLE
STOP	Stop at safe point	EXECUTING
ABORT	Immediate abort	SETTING UP, READY, EXECUTING, PAUSED
PAUSE	Pause processing	EXECUTING
RESUME	Resume from pause	PAUSED

7. Related Status Variables

SVID	Name	Type	Description
[3001]	ProcessState	U1	Current processing state
[3002]	PreviousProcessState	U1	Previous processing state
[3003]	CurrentRecipeID	A	Currently loaded recipe
[3004]	ProcessingTime	U4	Time in current state (seconds)

ProcessState Values:

Value	State
0	INIT
1	IDLE
2	SETTING UP
3	READY
4	EXECUTING
5	PAUSING
6	PAUSED
7	ABORTING

8. Related Collection Events

CEID	Name	Description
[3001]	ProcessStateChange	Triggered on any process state change
[3002]	ProcessStarted	Triggered when entering EXECUTING
[3003]	ProcessCompleted	Triggered when process completes normally
[3004]	ProcessPaused	Triggered when entering PAUSED
[3005]	ProcessResumed	Triggered when resuming from PAUSED
[3006]	ProcessAborted	Triggered when process is aborted

9. Related Alarms

ALID	ALTX	Category	Set Condition	Clear Condition
[3001]	Process Abort	Warning	Process aborted	Process restarted
[3002]	Setup Failed	Error	Setup cannot complete	Operator intervention
[3003]	Process Timeout	Warning	Process exceeds time limit	Process completes

10. Sequence Diagrams

10.1 Normal Process Cycle

sequenceDiagram participant Host participant Equipment Note over Equipment: State: IDLE Host->>Equipment: S2F41 (RCMD=START, Recipe=XXX) Equipment-->>Host: S2F42 (HCACK=0) Note over Equipment: State: SETTING UP Equipment->>Host: S6F11 (ProcessStateChange) Host-->>Equipment: S6F12 Note over Equipment: State: READY Equipment->>Host: S6F11 (ProcessStateChange) Host-->>Equipment: S6F12 Note over Equipment: State: EXECUTING Note over Equipment: Processing... Equipment->>Host: S6F11 (ProcessCompleted) Host-->>Equipment: S6F12 Note over Equipment: State: IDLE

10.2 Pause and Resume

sequenceDiagram participant Host participant Equipment Note over Equipment: State: EXECUTING Host->>Equipment: S2F41 (RCMD=PAUSE) Equipment-->>Host: S2F42 (HCACK=0) Note over Equipment: State: PAUSING Equipment->>Host: S6F11 (ProcessPaused) Host-->>Equipment: S6F12 Note over Equipment: State: PAUSED Host->>Equipment: S2F41 (RCMD=RESUME) Equipment-->>Host: S2F42 (HCACK=0) Note over Equipment: State: EXECUTING Equipment->>Host: S6F11 (ProcessResumed) Host-->>Equipment: S6F12

11. Equipment-Specific Processing States

Note: The processing state model above is a generic template. Equipment-specific states and transitions should be documented below.

11.1 Custom States (if applicable)

State	Description	Parent State
[Custom State 1]	[Description]	EXECUTING
[Custom State 2]	[Description]	EXECUTING

11.2 Custom Transitions

From	To	Trigger	Description
[State A]	[State B]	[Trigger]	[Description]