Variables Definition

Overview

This chapter defines all variables supported by the equipment:

Variable Type	Abbreviation	Description	Access
Status Variable	SV	Real-time equipment status	Read-only
Equipment Constant	EC	Configurable parameters	Read/Write
Data Variable	DV	Process data for collection	Read-only

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Status Variables (SV)

Status Variables represent the current state of the equipment. They are read-only and updated by the equipment in real-time.

System Status Variables (SVID 1-99)

SVID	Name	Format	Units	Description
1	Clock	A[14]	-	Equipment clock (YYYYMMDDHHmmss)
2	ControlState	U1	-	Current control state
3	PreviousControlState	U1	-	Previous control state
4	EventsEnabled	Boolean	-	Event reporting enabled
5	AlarmsEnabled	Boolean	-	Alarm reporting enabled
6	ProcessState	U1	-	Current process state
7	PreviousProcessState	U1	-	Previous process state
8	PPExecName	A[40]	-	Currently executing recipe
9	PPFormat	U1	-	Recipe format type
10	SpoolState	U1	-	Spooling state
11	SpoolCountActual	U4	-	Current spool message count
12	SpoolCountTotal	U4	-	Maximum spool capacity
13	SpoolFullTime	A[14]	-	Time spool became full
14	SpoolStartTime	A[14]	-	Spool start timestamp

ControlState Values

Value	State	Description
1	EQUIPMENT-OFFLINE	Equipment offline, no host control
2	ATTEMPT-ONLINE	Attempting to establish online
3	HOST-OFFLINE	Host requested equipment offline
4	ONLINE-LOCAL	Online, operator in control
5	ONLINE-REMOTE	Online, host in control

ProcessState Values

Value	State	Description
0	INIT	Equipment initializing
1	IDLE	Ready, waiting for job
2	SETUP	Setup/preparation in progress
3	READY	Ready to execute process
4	EXECUTING	Process executing
5	PAUSE	Process paused
6	STOPPING	Stop in progress
7	ABORTING	Abort in progress
8	COMPLETE	Process complete

Equipment Status Variables (SVID 100-199)

SVID	Name	Format	Units	Description
100	EquipmentModel	A[20]	-	Equipment model name
101	SoftwareVersion	A[12]	-	Equipment software version
102	EquipmentID	A[40]	-	Unique equipment identifier
103	OperatorID	A[20]	-	Current logged-in operator
104	EquipmentStatus	U1	-	Overall equipment status
105	MaintenanceStatus	U1	-	Maintenance mode status
106	InterlockStatus	U1	-	Safety interlock status
107	EmergencyStopStatus	Boolean	-	E-STOP active
108	DoorStatus	U1	-	Chamber door status
109	VacuumStatus	U1	-	Vacuum system status

Process Monitoring Variables (SVID 200-299)

SVID	Name	Format	Units	Description
200	ChamberTemperature	F4	degC	Chamber temperature
201	ChamberPressure	F4	Torr	Chamber pressure
202	ChamberVacuum	F4	mTorr	Vacuum level
203	SubstrateTemperature	F4	degC	Substrate temperature
204	HeaterPower	F4	%	Heater power percentage
205	HeaterSetpoint	F4	degC	Heater setpoint
210	GasFlow_N2	F4	sccm	Nitrogen flow rate
211	GasFlow_O2	F4	sccm	Oxygen flow rate
212	GasFlow_Ar	F4	sccm	Argon flow rate
213	GasFlow_CF4	F4	sccm	CF4 flow rate
214	GasFlow_CHF3	F4	sccm	CHF3 flow rate
215	TotalGasFlow	F4	sccm	Total gas flow
220	RF_Power	F4	W	RF forward power
221	RF_ReflectedPower	F4	W	RF reflected power
222	RF_Frequency	F4	MHz	RF frequency
223	DC_Bias	F4	V	DC bias voltage
224	MatchPosition_Load	F4	%	Match load position
225	MatchPosition_Tune	F4	%	Match tune position

Process Data Variables (SVID 300-399)

SVID	Name	Format	Units	Description
300	CurrentRecipe	A[40]	-	Current recipe name
301	RecipeVersion	A[10]	-	Recipe version
302	CurrentStep	U2	-	Current step number
303	TotalSteps	U2	-	Total steps in recipe
304	StepElapsedTime	U4	sec	Current step elapsed time
305	StepRemainingTime	U4	sec	Current step remaining time
306	ProcessElapsedTime	U4	sec	Total process elapsed time
307	ProcessRemainingTime	U4	sec	Total remaining time
308	CycleCount	U4	-	Process cycle counter
309	LastProcessResult	U1	-	Last process result
310	CurrentLotID	A[40]	-	Current lot identifier
311	CurrentSubstrateID	A[40]	-	Current substrate ID

Carrier/Port Variables (SVID 400-499, GEM 300)

SVID	Name	Format	Units	Description
400	Port1_CarrierID	A[80]	-	Carrier ID at port 1
401	Port1_AccessMode	U1	-	Port 1 access mode
402	Port1_ReserveState	U1	-	Port 1 reserve state
403	Port1_TransferState	U1	-	Port 1 transfer state
404	Port1_AssociationState	U1	-	Port 1 association state
410	Port2_CarrierID	A[80]	-	Carrier ID at port 2
411	Port2_AccessMode	U1	-	Port 2 access mode
412	Port2_ReserveState	U1	-	Port 2 reserve state
413	Port2_TransferState	U1	-	Port 2 transfer state
414	Port2_AssociationState	U1	-	Port 2 association state
450	TotalCarriersProcessed	U4	-	Total carriers processed
451	TotalSubstratesProcessed	U4	-	Total substrates processed
452	TotalSubstratesRejected	U4	-	Total substrates rejected

Equipment Health Variables (SVID 500-599)

SVID	Name	Format	Units	Description
500	OperatingHours	U4	hr	Total operating hours
501	IdleHours	U4	hr	Total idle hours
502	ProcessCycles	U4	-	Total process cycles
503	NextPMDate	A[14]	-	Next PM due date
504	PMDaysRemaining	I4	days	Days until next PM
505	ConsumableLife_1	F4	%	Consumable 1 remaining
506	ConsumableLife_2	F4	%	Consumable 2 remaining
507	ConsumableLife_3	F4	%	Consumable 3 remaining
510	AlarmCountToday	U4	-	Alarms today
511	AlarmCountTotal	U4	-	Total alarm count
512	LastAlarmCode	U4	-	Last alarm code
513	LastAlarmTime	A[14]	-	Last alarm timestamp
514	MTBF	F4	hr	Mean time between failures
515	MTTR	F4	hr	Mean time to repair

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Equipment Constants (EC)

Equipment Constants are configurable parameters that can be modified by the host or operator.

Communication Constants (ECID 1-49)

ECID	Name	Format	Default	Min	Max	Units	Description
1	TimeFormat	U1	0	0	2	-	Time format type
2	EstablishCommTimeout	U2	30	10	120	sec	S1F13 timeout
3	InitialControlState	U1	4	1	5	-	Startup control state
4	InitOnlineSubstate	U1	5	4	5	-	Initial online substate
5	HeartbeatInterval	U2	60	10	300	sec	S1F1 interval
6	MaxSpoolMessages	U4	1000	100	50000	-	Max spool capacity
7	SpoolEnable	Boolean	True	-	-	-	Enable spooling
8	SpoolOverwritePolicy	U1	0	0	1	-	0=FIFO, 1=Reject

TimeFormat Values

Value	Format	Example
0	YYYYMMDDHHmmss	20250101120000
1	YYYYMMDDHHmmsscc	2025010112000000
2	ISO 8601	2025-01-01T12:00:00

HSMS Timer Constants (ECID 50-59)

ECID	Name	Format	Default	Min	Max	Units	Description
50	HSMS_T3	U2	45	1	120	sec	Reply timeout
51	HSMS_T5	U2	10	1	240	sec	Connection separation
52	HSMS_T6	U2	5	1	240	sec	Control transaction timeout
53	HSMS_T7	U2	10	1	240	sec	Not selected timeout
54	HSMS_T8	U2	5	1	120	sec	Network intercharacter timeout
55	HSMS_LinkTestPeriod	U2	0	0	3600	sec	Link test period (0=disabled)

Process Constants (ECID 100-199)

ECID	Name	Format	Default	Min	Max	Units	Description
100	DefaultProcessTemp	F4	25.0	0.0	500.0	degC	Default process temp
101	MaxProcessTemp	F4	400.0	100.0	600.0	degC	Maximum allowed temp
102	TempRampRate	F4	10.0	1.0	50.0	degC/min	Temperature ramp rate
103	TempStabilizeTime	U2	60	10	600	sec	Temp stabilization time
104	TempTolerance	F4	2.0	0.1	10.0	degC	Temperature tolerance
110	DefaultChamberPressure	F4	760.0	0.001	1000.0	Torr	Default pressure
111	VacuumBaseLimit	F4	0.01	0.001	1.0	mTorr	Base vacuum limit
112	VacuumPumpdownTime	U2	180	30	600	sec	Max pumpdown time
120	DefaultRFPower	F4	100.0	0.0	1000.0	W	Default RF power
121	MaxRFPower	F4	500.0	100.0	2000.0	W	Maximum RF power
122	RFReflectLimit	F4	50.0	10.0	100.0	W	RF reflect limit
130	ProcessTimeout	U4	7200	60	86400	sec	Process timeout
131	StepTimeout	U4	1800	30	7200	sec	Step timeout
132	IdleTimeout	U4	300	60	3600	sec	Idle timeout

Carrier Handling Constants (ECID 200-249, GEM 300)

ECID	Name	Format	Default	Min	Max	Units	Description
200	CarrierSlotCount	U2	25	1	100	-	Slots per carrier
201	LoadPortCount	U1	2	1	8	-	Number of load ports
202	AutoLoadEnable	Boolean	True	-	-	-	Auto carrier load
203	AutoUnloadEnable	Boolean	True	-	-	-	Auto carrier unload
204	IDVerificationMode	U1	1	0	2	-	ID verification mode
205	ContentMapVerify	Boolean	True	-	-	-	Verify content map
206	CarrierOutOnComplete	Boolean	True	-	-	-	Output carrier on complete
210	TransferTimeout	U4	120	30	600	sec	Transfer timeout
211	ClampTimeout	U2	10	5	60	sec	Clamp timeout
212	DockTimeout	U2	30	10	120	sec	Dock timeout

IDVerificationMode Values

Value	Mode	Description
0	NONE	No ID verification
1	HOST	Host provides carrier IDs
2	EQUIPMENT	Equipment reads carrier IDs

Alarm/Event Constants (ECID 250-299)

ECID	Name	Format	Default	Min	Max	Units	Description
250	AlarmReportEnable	Boolean	True	-	-	-	Enable alarm reports
251	EventReportEnable	Boolean	True	-	-	-	Enable event reports
252	AutoClearAlarm	Boolean	False	-	-	-	Auto-clear recoverable alarms
253	AlarmRetryCount	U1	3	1	10	-	Alarm report retry count
260	TraceEnable	Boolean	False	-	-	-	Enable trace reports
261	TracePeriod	U4	1000	100	60000	ms	Trace sample period
262	TraceGroupID	U4	1	1	100	-	Active trace group

---

Data Variables (DV)

Data Variables are collected during processing and included in event reports.

Process Data Variables (DVID 1-99)

DVID	Name	Format	Units	Description	Reported With
1	ProcessStartTime	A[14]	-	Process start timestamp	CEID 1001
2	ProcessEndTime	A[14]	-	Process end timestamp	CEID 1002
3	ProcessDuration	U4	sec	Total process time	CEID 1002
4	ProcessRecipe	A[40]	-	Recipe executed	CEID 1001, 1002
5	ProcessResult	U1	-	Result code	CEID 1002
6	StepNumber	U2	-	Completed step	CEID 1010
7	StepName	A[40]	-	Completed step name	CEID 1010
8	StepDuration	U4	sec	Step duration	CEID 1010
10	AvgProcessTemp	F4	degC	Average temperature	CEID 1002
11	MaxProcessTemp	F4	degC	Maximum temperature	CEID 1002
12	AvgProcessPressure	F4	Torr	Average pressure	CEID 1002
13	TotalRFEnergy	F4	Wh	Total RF energy	CEID 1002
14	TotalGasUsage	F4	scc	Total gas consumed	CEID 1002

ProcessResult Values

Value	Result	Description
0	SUCCESS	Process completed successfully
1	ABORT	Process aborted by operator/host
2	TIMEOUT	Process timeout
3	ERROR	Process error occurred
4	INTERLOCK	Safety interlock triggered

Carrier Data Variables (DVID 100-149)

DVID	Name	Format	Units	Description	Reported With
100	CarrierID	A[80]	-	Carrier identifier	CEID 2001-2010
101	PortID	U1	-	Load port number	CEID 2001-2010
102	CarrierAccessMode	U1	-	Carrier access mode	CEID 2001
103	ContentMap	L	-	Slot occupancy map	CEID 2003
104	SlotMap	L	-	Detailed slot map	CEID 2004
105	SubstrateCountInCarrier	U2	-	Substrate count	CEID 2003
106	CarrierUsage	A[20]	-	Carrier usage type	CEID 2001
107	CarrierCapacity	U2	-	Carrier slot count	CEID 2001

ContentMap Structure (DVID 103)

<L[n]                              // n = number of slots
  <L[2]
    <SlotID U1>                    // Slot number (1-25)
    <SlotState U1>                 // 0=Empty, 1=Occupied, 2=Double, 3=Cross
  >
  ...
>

SlotState Values

Value	State	Description
0	EMPTY	Slot is empty
1	OCCUPIED	Substrate present
2	DOUBLE_SLOTTED	Two substrates detected
3	CROSS_SLOTTED	Cross-slotted substrate
4	UNKNOWN	Cannot determine state

Substrate Data Variables (DVID 150-199)

DVID	Name	Format	Units	Description	Reported With
150	SubstrateID	A[40]	-	Substrate identifier	CEID 3001-3010
151	SubstrateLotID	A[40]	-	Lot identifier	CEID 3001
152	SubstrateType	U1	-	Substrate type	CEID 3001
153	SourceCarrier	A[80]	-	Source carrier ID	CEID 3001
154	SourceSlot	U1	-	Source slot number	CEID 3001
155	DestCarrier	A[80]	-	Destination carrier	CEID 3005
156	DestSlot	U1	-	Destination slot	CEID 3005
157	SubstrateState	U1	-	Current state	CEID 3001-3010
158	SubstrateLocation	A[20]	-	Current location	CEID 3002-3005
159	ProcessingResult	U1	-	Processing result	CEID 3004

SubstrateState Values

Value	State	Description
0	AT_SOURCE	At source location
1	IN_PROCESS	Being processed
2	AT_DESTINATION	At destination
3	IN_TRANSIT	Being transferred
4	REJECTED	Rejected (failed)
5	ABORTED	Process aborted
6	STOPPED	Stopped by host
7	SKIPPED	Skipped by host

Measurement Data Variables (DVID 200-249)

DVID	Name	Format	Units	Description	Reported With
200	MeasuredThickness	F4	nm	Film thickness	CEID 4001
201	ThicknessUniformity	F4	%	Thickness uniformity	CEID 4001
202	ThicknessRange	F4	nm	Thickness range	CEID 4001
203	MeasuredRefractive	F4	-	Refractive index	CEID 4001
204	SheetResistance	F4	ohm/sq	Sheet resistance	CEID 4002
205	ResistanceUniformity	F4	%	Resistance uniformity	CEID 4002
210	DefectCount	U4	-	Total defects	CEID 4003
211	DefectDensity	F4	/cm2	Defect density	CEID 4003
212	KillerDefects	U4	-	Killer defect count	CEID 4003
220	StressValue	F4	MPa	Film stress	CEID 4004
221	BowValue	F4	um	Substrate bow	CEID 4004
222	WarpValue	F4	um	Substrate warp	CEID 4004

Job Data Variables (DVID 250-299)

DVID	Name	Format	Units	Description	Reported With
250	ProcessJobID	A[40]	-	Process job ID	CEID 5001-5010
251	ControlJobID	A[40]	-	Control job ID	CEID 5001-5010
252	JobState	U1	-	Job state	CEID 5001-5010
253	JobRecipe	A[40]	-	Job recipe	CEID 5002
254	JobStartTime	A[14]	-	Job start timestamp	CEID 5002
255	JobEndTime	A[14]	-	Job end timestamp	CEID 5006
256	JobResult	U1	-	Job completion result	CEID 5006
257	SubstratesPlanned	U2	-	Planned substrate count	CEID 5002
258	SubstratesCompleted	U2	-	Completed substrates	CEID 5006
259	SubstratesFailed	U2	-	Failed substrates	CEID 5006

---

Variable Access Messages

Read Status Variables (S1F3/S1F4)

Request - Specific SVs:

S1F3 W
  <L[5]
    <U4 1>                         // Clock
    <U4 6>                         // ProcessState
    <U4 200>                       // ChamberTemperature
    <U4 300>                       // CurrentRecipe
    <U4 500>                       // OperatingHours
  >
.

Response:

S1F4
  <L[5]
    <A[14] "20250101120000">       // Clock
    <U1 1>                         // ProcessState = IDLE
    <F4 25.3>                      // ChamberTemperature
    <A[20] "PROD_RECIPE_001">      // CurrentRecipe
    <U4 12500>                     // OperatingHours
  >
.

Read Equipment Constants (S2F13/S2F14)

Request:

S2F13 W
  <L[4]
    <U4 100>                       // DefaultProcessTemp
    <U4 101>                       // MaxProcessTemp
    <U4 130>                       // ProcessTimeout
    <U4 200>                       // CarrierSlotCount
  >
.

Response:

S2F14
  <L[4]
    <F4 25.0>                      // DefaultProcessTemp
    <F4 400.0>                     // MaxProcessTemp
    <U4 7200>                      // ProcessTimeout
    <U2 25>                        // CarrierSlotCount
  >
.

Write Equipment Constants (S2F15/S2F16)

Request:

S2F15 W
  <L[3]
    <L[2]
      <U4 100>                     // ECID
      <F4 30.0>                    // New DefaultProcessTemp
    >
    <L[2]
      <U4 130>                     // ECID
      <U4 10800>                   // New ProcessTimeout
    >
    <L[2]
      <U4 202>                     // ECID
      <Boolean True>               // AutoLoadEnable
    >
  >
.

Response:

S2F16
  <B[1] 0x00>                      // EAC = Accepted
.

EAC Values

Value	Name	Description
0x00	OK	All parameters accepted
0x01	DENIED_INVALID	At least one constant invalid
0x02	DENIED_BUSY	Equipment busy
0x03	DENIED_ECID	Invalid ECID
0x04	DENIED_VALUE	Value out of range

---

Implementation Notes

Variable ID Allocation

Recommended ID ranges for customization:

• SVID 1-99: System variables (standard)
• SVID 100-199: Equipment status
• SVID 200-299: Process monitoring
• SVID 300-399: Process data
• SVID 400-499: Carrier/Port (GEM 300)
• SVID 500-599: Equipment health

• SVID 600-999: Custom/Reserved

• ECID 1-49: Communication

• ECID 50-99: Timers
• ECID 100-199: Process constants
• ECID 200-249: Carrier handling
• ECID 250-299: Alarm/Event

• ECID 300-999: Custom/Reserved

• DVID 1-99: Process data

• DVID 100-149: Carrier data
• DVID 150-199: Substrate data
• DVID 200-249: Measurement data
• DVID 250-299: Job data
• DVID 300-999: Custom/Reserved