Alarms¶

1. Overview¶

Alarms notify the host of abnormal equipment conditions. Each alarm has a unique ID (ALID), text description (ALTX), and category code (ALCD) indicating severity. Alarms are critical for factory safety, equipment protection, and process quality assurance.

1.1 Key Concepts¶

Term	Description
ALID	Alarm ID - Unique identifier for each alarm
ALCD	Alarm Code - Category and set/clear status
ALTX	Alarm Text - Human-readable description
ALED	Alarm Enable/Disable flag

1.2 Alarm State Model¶

stateDiagram-v2 [*] --> Disabled: Initial Disabled --> Enabled: S5F3 (ALED=1) Enabled --> Disabled: S5F3 (ALED=0) Enabled --> Active: Condition Detected Active --> Enabled: Condition Cleared Active --> Acknowledged: Operator Ack Acknowledged --> Enabled: Condition Cleared

2. Alarm Categories (ALCD)¶

2.1 Category Definitions¶

ALCD	Category Name	Description	Priority
1	Personal Safety	Immediate danger to personnel	Highest
2	Equipment Safety	Immediate danger to equipment	High
3	Parameter Control Warning	Parameter approaching limit	Medium
4	Parameter Control Error	Parameter exceeded limit	Medium
5	Irrecoverable Error	Equipment cannot continue	High
6	Equipment Status Warning	Abnormal condition detected	Low
7	Attention Flags	Operator attention required	Low
8	Data Integrity	Data corruption detected	Medium

2.2 ALCD Bit Structure¶

The ALCD byte contains both the set/clear flag and category:

Bit Position	Description
Bit 7 (MSB)	Set/Clear: 0=Cleared, 1=Set
Bits 6-0	Alarm Category (1-8)

Examples:

ALCD Value	Binary	Meaning
0x01	0000 0001	Category 1, Cleared
0x81	1000 0001	Category 1, Set
0x06	0000 0110	Category 6, Cleared
0x86	1000 0110	Category 6, Set

3. Alarm Definitions¶

3.1 Communication Alarms (ALID 1000-1099)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
1001	Host Communication Lost	6	HSMS disconnected	Communication restored
1002	T3 Reply Timeout	6	No reply within T3	Successful message exchange
1003	T6 Control Timeout	6	No control response within T6	Control response received
1004	T7 Connection Timeout	6	Connection not established within T7	Connection established
1005	Secondary Host Comm Lost	6	Secondary host disconnected	Secondary host connected
1006	Message Parse Error	8	Invalid SECS-II message received	N/A (event only)
1007	Spool Buffer Full	6	Spool capacity exceeded	Spool space available
1008	Spool Transmit Failed	6	Spool data transmission failed	Spool data transmitted

3.2 System Alarms (ALID 2000-2099)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
2001	Power Failure Warning	2	UPS on battery	AC power restored
2002	UPS Battery Low	2	Battery < 20%	Battery > 50%
2003	System Error	5	Critical system error	System restart
2004	Disk Space Low	6	Disk < 10% free	Disk >= 20% free
2005	Disk Space Critical	5	Disk < 2% free	Disk >= 10% free
2006	Memory Low	6	RAM < 10% free	RAM >= 20% free
2007	CPU Overload	6	CPU > 90% for 60 sec	CPU < 70%
2008	Software Exception	5	Unhandled exception	System restart
2009	Configuration Error	5	Config file invalid	Config corrected
2010	License Expired	6	License expired	License renewed
2011	Clock Drift Detected	6	Time drift > 1 sec	Clock synchronized
2012	Log File Error	8	Cannot write log	Log path accessible
2013	Database Error	5	Database connection lost	Database connected
2014	Backup Failed	8	Backup process failed	Backup successful

3.3 Process Alarms (ALID 3000-3199)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
3001	Temperature High Warning	3	Temp > HighWarn limit	Temp <= HighWarn limit
3002	Temperature High Error	4	Temp > HighError limit	Temp <= HighError limit
3003	Temperature Low Warning	3	Temp < LowWarn limit	Temp >= LowWarn limit
3004	Temperature Low Error	4	Temp < LowError limit	Temp >= LowError limit
3005	Temperature Control Failed	5	Temp cannot reach setpoint	Temp at setpoint
3010	Pressure High Warning	3	Pressure > HighWarn limit	Pressure <= HighWarn limit
3011	Pressure High Error	4	Pressure > HighError limit	Pressure <= HighError limit
3012	Pressure Low Warning	3	Pressure < LowWarn limit	Pressure >= LowWarn limit
3013	Pressure Low Error	4	Pressure < LowError limit	Pressure >= LowError limit
3014	Vacuum Loss	5	Vacuum cannot be maintained	Vacuum restored
3020	Gas Flow High Warning	3	Flow > HighWarn limit	Flow <= HighWarn limit
3021	Gas Flow High Error	4	Flow > HighError limit	Flow <= HighError limit
3022	Gas Flow Low Warning	3	Flow < LowWarn limit	Flow >= LowWarn limit
3023	Gas Flow Low Error	4	Flow < LowError limit	Flow >= LowError limit
3024	Gas Supply Pressure Low	4	Supply pressure below minimum	Supply pressure restored
3030	Power High Warning	3	Power > HighWarn limit	Power <= HighWarn limit
3031	Power High Error	4	Power > HighError limit	Power <= HighError limit
3040	Process Time Exceeded	4	Process time > max limit	Process completed
3041	Process Abort Requested	6	Operator/Host abort	Process stopped
3050	Recipe Parameter Error	5	Invalid recipe parameter	Recipe corrected
3051	Recipe Step Timeout	4	Step time exceeded	Step completed
3052	Recipe Execution Error	5	Recipe execution failed	Recipe restarted
3060	End Point Detection Failed	4	EPD signal not detected	EPD successful
3070	Substrate Missing	5	Expected substrate not present	Substrate loaded
3071	Substrate Misaligned	4	Substrate position error	Substrate aligned
3072	Substrate Broken	5	Substrate breakage detected	Substrate removed

3.4 Hardware Alarms (ALID 4000-4199)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
4001	Robot Communication Error	5	Robot controller comm lost	Robot comm restored
4002	Robot Motion Error	5	Robot motion fault	Robot reset
4003	Robot Position Error	4	Robot position deviation	Position corrected
4004	Robot Servo Off	2	Robot servo turned off	Servo enabled
4005	Robot Collision Detected	2	Collision sensor triggered	Robot safe
4010	Motor Overload	4	Motor current exceeded	Current normal
4011	Motor Stall	5	Motor not responding	Motor moving
4012	Encoder Error	5	Encoder signal lost	Encoder signal OK
4020	Valve Operation Error	5	Valve did not respond	Valve operational
4021	Valve Position Error	4	Valve position mismatch	Position corrected
4030	Pump Error	5	Pump operation failed	Pump operational
4031	Pump Overheating	3	Pump temp high	Pump temp normal
4040	MFC Communication Error	5	MFC controller comm lost	MFC comm restored
4041	MFC Zero Drift	4	MFC zero point drifted	MFC calibrated
4050	Heater Communication Error	5	Heater controller comm lost	Heater comm restored
4051	Heater Open Circuit	5	Heater element open	Heater replaced
4052	Heater Short Circuit	5	Heater element shorted	Heater replaced
4060	Sensor Communication Error	5	Sensor comm lost	Sensor comm restored
4061	Sensor Out of Range	4	Sensor reading invalid	Sensor reading valid
4062	Sensor Calibration Due	7	Calibration interval exceeded	Sensor calibrated
4070	Chamber Leak Detected	4	Leak rate exceeded	Leak rate normal
4071	Chamber Door Open	2	Door switch not closed	Door closed
4080	Cooling Water Flow Low	4	Cooling flow below minimum	Cooling flow restored
4081	Cooling Water Temp High	3	Cooling water temp high	Cooling water temp normal
4090	Exhaust Pressure High	4	Exhaust blockage detected	Exhaust clear
4091	Exhaust Fan Error	4	Exhaust fan not running	Exhaust fan running

3.5 Load Port Alarms (ALID 4200-4299)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
4201	Load Port 1 Error	5	LP1 operation error	LP1 reset
4202	Load Port 2 Error	5	LP2 operation error	LP2 reset
4203	Load Port 3 Error	5	LP3 operation error	LP3 reset
4204	Load Port 4 Error	5	LP4 operation error	LP4 reset
4210	FOUP Clamp Error	4	Clamp operation failed	Clamp operational
4211	FOUP Dock Error	4	Dock operation failed	Dock operational
4212	FOUP Door Error	4	Door operation failed	Door operational
4213	FOUP Mapping Error	4	Mapping sensor error	Mapping successful
4220	Carrier ID Read Error	6	ID reader failure	ID read successful
4221	Carrier ID Mismatch	4	ID does not match expected	ID verified
4230	Load Port Interlock	2	LP interlock triggered	Interlock cleared

3.6 Safety Alarms (ALID 5000-5099)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
5001	Emergency Stop Activated	1	EMO button pressed	EMO reset
5002	Safety Interlock Open	2	Safety interlock triggered	Interlock closed
5003	Safety Guard Open	1	Safety guard opened during operation	Guard closed
5004	Light Curtain Interrupted	1	Light curtain beam broken	Light curtain clear
5005	Fire Detected	1	Fire sensor activated	Fire sensor clear
5006	Smoke Detected	1	Smoke sensor activated	Smoke sensor clear
5007	Gas Leak Detected	1	Gas detector triggered	Gas level safe
5008	High Voltage Exposed	1	HV door opened	HV door closed
5010	Earthquake Detected	1	Seismic sensor triggered	Seismic sensor clear
5011	Over Temperature Shutdown	2	Critical temp exceeded	Temp safe
5012	Pressure Relief Activated	2	Pressure relief triggered	Pressure normal
5020	Robot Area Intrusion	1	Robot area sensor triggered	Robot area clear
5021	Pinch Point Warning	1	Pinch point sensor triggered	Sensor clear

3.7 Utility Alarms (ALID 6000-6099)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
6001	Facility CDA Pressure Low	4	CDA pressure below minimum	CDA pressure restored
6002	Facility N2 Pressure Low	4	N2 pressure below minimum	N2 pressure restored
6003	Facility Vacuum Low	4	Facility vacuum below minimum	Vacuum restored
6004	Facility Water Flow Low	4	Cooling water flow low	Water flow restored
6005	Facility Exhaust Off	4	Facility exhaust stopped	Exhaust running
6010	Process Gas 1 Low	4	Gas 1 pressure low	Gas 1 pressure OK
6011	Process Gas 2 Low	4	Gas 2 pressure low	Gas 2 pressure OK
6012	Process Gas 3 Low	4	Gas 3 pressure low	Gas 3 pressure OK
6020	Scrubber Status Warning	3	Scrubber efficiency low	Scrubber OK
6021	Scrubber Error	4	Scrubber failure	Scrubber operational

3.8 Quality Alarms (ALID 7000-7099)¶

ALID	ALTX	ALCD	Set Condition	Clear Condition
7001	Process Spec Violation	4	Process out of spec	Process within spec
7002	Measurement Out of Range	4	Measurement exceeded limit	Measurement in range
7003	SPC Violation	6	SPC rule triggered	SPC normal
7004	Consecutive Failures	4	N consecutive fails	Successful process
7005	Yield Below Threshold	6	Yield below minimum	Yield recovered
7010	PM Interval Exceeded	7	PM schedule overdue	PM completed
7011	Component Lifetime Warning	7	Component near end of life	Component replaced
7012	Calibration Due	7	Calibration interval exceeded	Calibration completed

4. Alarm Messages¶

4.1 S5F1 - Alarm Report Send¶

Equipment sends alarm notification to host.

S5F1 W
  <L[3]
    <ALCD>                      // Alarm code (category + set/clear)
    <ALID>                      // Alarm ID
    <ALTX>                      // Alarm text
  >
.

4.2 S5F1 Examples¶

Example 1 - Temperature High Alarm Set:

S5F1 W
  <L[3]
    <B[1] 0x83>                 // ALCD = Set + Category 3 (Warning)
    <U4 3001>                   // ALID = Temperature High Warning
    <A[35] "Temperature High Warning: Zone 1 = 125.3C">
  >
.

Example 2 - Temperature Alarm Cleared:

S5F1 W
  <L[3]
    <B[1] 0x03>                 // ALCD = Clear + Category 3
    <U4 3001>                   // ALID = Temperature High Warning
    <A[35] "Temperature High Warning: Zone 1 = 125.3C">
  >
.

Example 3 - Emergency Stop (Personal Safety):

S5F1 W
  <L[3]
    <B[1] 0x81>                 // ALCD = Set + Category 1 (Personal Safety)
    <U4 5001>                   // ALID = Emergency Stop
    <A[25] "Emergency Stop Activated">
  >
.

Example 4 - Equipment Safety Alarm:

S5F1 W
  <L[3]
    <B[1] 0x82>                 // ALCD = Set + Category 2 (Equipment Safety)
    <U4 4005>                   // ALID = Robot Collision
    <A[40] "Robot Collision Detected at Position X=150, Y=200">
  >
.

4.3 S5F2 - Alarm Report Acknowledge¶

S5F2
  <ACKC5>                       // Acknowledge code
.

ACKC5	Description
0x00	Accepted

4.4 S5F3 - Enable/Disable Alarm Send¶

Host enables or disables alarm reporting.

S5F3 W
  <L[2]
    <ALED>                      // 0=Disable, 1=Enable
    <ALID>                      // Alarm ID (0 = all alarms)
  >
.

Example - Enable Specific Alarm:

S5F3 W
  <L[2]
    <Boolean 1>                 // Enable
    <U4 3001>                   // ALID = Temperature High Warning
  >
.

Example - Disable All Alarms:

S5F3 W
  <L[2]
    <Boolean 0>                 // Disable
    <U4 0>                      // 0 = All alarms
  >
.

4.5 S5F4 - Enable/Disable Alarm Acknowledge¶

S5F4
  <ACKC5>
.

4.6 S5F5 - List Alarms Request¶

Host requests alarm definitions.

S5F5 W
  <L[n]                         // n alarms to query
    <ALID>                      // Alarm ID (empty list = all)
    ...
  >
.

Example - Query Specific Alarms:

S5F5 W
  <L[3]
    <U4 3001>                   // Temperature High Warning
    <U4 3002>                   // Temperature High Error
    <U4 5001>                   // Emergency Stop
  >
.

Example - Query All Alarms:

S5F5 W
  <L[0]>                        // Empty = All alarms
.

4.7 S5F6 - List Alarm Data¶

S5F6
  <L[n]
    <L[3]
      <ALCD>                    // Category (without set/clear bit)
      <ALID>                    // Alarm ID
      <ALTX>                    // Alarm text
    >
    ...
  >
.

Example Response:

S5F6
  <L[3]
    <L[3]
      <B[1] 0x03>               // Category 3 (Parameter Warning)
      <U4 3001>
      <A[25] "Temperature High Warning">
    >
    <L[3]
      <B[1] 0x04>               // Category 4 (Parameter Error)
      <U4 3002>
      <A[23] "Temperature High Error">
    >
    <L[3]
      <B[1] 0x01>               // Category 1 (Personal Safety)
      <U4 5001>
      <A[25] "Emergency Stop Activated">
    >
  >
.

4.8 S5F7 - List Enabled Alarms Request¶

S5F7 W
  <L[0]>                        // Request enabled alarm list
.

4.9 S5F8 - List Enabled Alarms Data¶

S5F8
  <L[n]
    <L[3]
      <ALCD>                    // Current state (with set/clear bit if active)
      <ALID>
      <ALTX>
    >
    ...
  >
.

5. Alarm Reporting Sequences¶

5.1 Alarm Set Sequence¶

sequenceDiagram participant H as Host participant E as Equipment Note over E: Alarm Condition Detected E->>H: S5F1 W (ALCD=0x86, ALID=3001) Note right of E: Temperature High Warning H-->>E: S5F2 (ACKC5=0) Note over E: Also triggers Collection Event E->>H: S6F11 W (CEID=300, AlarmSet) H-->>E: S6F12 (ACKC6=0)

5.2 Alarm Clear Sequence¶

sequenceDiagram participant H as Host participant E as Equipment Note over E: Alarm Condition Cleared E->>H: S5F1 W (ALCD=0x06, ALID=3001) Note right of E: Temperature Normal H-->>E: S5F2 (ACKC5=0) Note over E: Also triggers Collection Event E->>H: S6F11 W (CEID=301, AlarmCleared) H-->>E: S6F12 (ACKC6=0)

5.3 Emergency Stop Sequence¶

sequenceDiagram participant H as Host participant E as Equipment Note over E: EMO Button Pressed E->>H: S5F1 W (ALCD=0x81, ALID=5001) Note right of E: Category 1 - Personal Safety H-->>E: S5F2 (ACKC5=0) E->>H: S6F11 W (CEID=303, PersonalSafetyAlarm) H-->>E: S6F12 (ACKC6=0) Note over E: Equipment enters SAFE state Note over E: All motion stops immediately

5.4 Initial Alarm Query¶

sequenceDiagram participant H as Host participant E as Equipment Note over H,E: After Communication Established H->>E: S5F5 W (Query All Alarms) E-->>H: S5F6 (All alarm definitions) H->>E: S5F7 W (Query Enabled Alarms) E-->>H: S5F8 (Enabled alarm list with current state) Note over H: Host now knows all<br/>active alarms

6. Alarm Priority and Actions¶

6.1 Priority Handling¶

Priority	Category	Typical Equipment Action
1	Personal Safety	Immediate stop, emergency shutdown, operator alert
2	Equipment Safety	Safe shutdown sequence, motion stop
3	Irrecoverable Error	Stop process, require intervention
4	Parameter Error	Pause process, adjust parameter
5	Parameter Warning	Log warning, continue operation
6	Equipment Warning	Log event, continue operation
7	Attention Flag	Operator notification
8	Data Integrity	Log error, verify data

6.2 Alarm Response Matrix¶

Alarm Category	Stop Motion	Stop Process	Sound Buzzer	Flash Beacon	Notify Host
1 (Personal Safety)	Immediate	Immediate	Yes	Red	Priority
2 (Equipment Safety)	Immediate	Controlled	Yes	Red	Priority
3 (Warning)	No	No	Optional	Yellow	Normal
4 (Error)	Controlled	Controlled	Yes	Yellow	Normal
5 (Irrecoverable)	Immediate	Immediate	Yes	Red	Priority
6 (Status Warning)	No	No	No	Yellow	Normal
7 (Attention)	No	No	Optional	Blue	Normal
8 (Data Integrity)	No	No	No	Yellow	Normal

7.1 Status Variables¶

SVID	Name	Type	Description
500	ActiveAlarmCount	U2	Number of currently active alarms
501	ActiveAlarmList	L	List of active ALIDs
502	HighestActiveAlarmCategory	U1	Highest severity active alarm
503	LastAlarmID	U4	Most recent alarm ALID
504	LastAlarmTime	A	Time of most recent alarm
505	AlarmHistoryCount	U4	Total alarms in history

7.2 Equipment Constants¶

ECID	Name	Type	Default	Description
500	MaxAlarmHistory	U4	10000	Maximum alarm history entries
501	AlarmBuzzerEnable	Boolean	True	Enable/disable alarm buzzer
502	AlarmBeaconEnable	Boolean	True	Enable/disable alarm beacon
503	AlarmAutoAckCategories	U1	0	Categories to auto-acknowledge

CEID	Event Name	Description
300	AlarmSet	Any alarm is set
301	AlarmCleared	Any alarm is cleared
302	AlarmAcknowledged	Any alarm is acknowledged
303	PersonalSafetyAlarm	Category 1 alarm set
304	EquipmentSafetyAlarm	Category 2 alarm set
305	IrrecoverableError	Category 5 alarm set
306	WarningAlarm	Category 3 or 6 alarm set

9. Implementation Guidelines¶

9.1 Alarm Persistence¶

Alarm state is maintained across communication loss
Active alarms are reported when communication is restored
Alarm history is logged locally with timestamp

9.2 Alarm Acknowledgment¶

Acknowledge Type	Description
Host Acknowledge	S5F2 response
Operator Acknowledge	Local HMI button
Auto Acknowledge	For non-critical alarms (configurable)

9.3 Multiple Alarms¶

When multiple alarms are active: 1. Process highest priority first 2. Send S5F1 for each alarm in priority order 3. Maintain alarm queue for retries

9.4 Alarm Flood Protection¶

Parameter	Value	Description
MaxAlarmsPerSecond	10	Rate limit for alarm messages
AlarmDebounceTime	100 ms	Minimum time between same alarm
AlarmBurstThreshold	50	Number before flood warning

10. Implementation Checklist¶

Feature	Required	Notes
S5F1/F2 Alarm Send	Yes	Core alarm reporting
S5F3/F4 Enable/Disable	Yes	Alarm control
S5F5/F6 List Alarms	Yes	Alarm query
S5F7/F8 Enabled Alarms	Yes	Active alarm query
Category Support	Yes	All 8 categories
Set/Clear Indication	Yes	ALCD bit 7
Collection Event Link	Yes	CEID 300/301
Alarm History	Yes	Local logging
Alarm Persistence	Yes	Across comm loss
Priority Handling	Yes	Category-based
Concurrent Alarms	Yes	Multiple active
Alarm Text	Yes	Descriptive ALTX