Scenario: Process Complete¶

1. Overview¶

This scenario describes the complete event reporting flow when equipment completes processing, including data collection and state transitions.

2. Preconditions¶

Condition	Required State
Communication	COMMUNICATING
Control State	ONLINE
Process State	EXECUTING

3. Complete Process Flow¶

sequenceDiagram participant Host participant Equipment rect rgb(240, 255, 240) Note over Host,Equipment: Process Execution Note over Equipment: State: EXECUTING Note over Equipment: Processing material... end rect rgb(255, 248, 240) Note over Host,Equipment: Process Completion Note over Equipment: Process steps complete Note over Equipment: State: IDLE end rect rgb(240, 248, 255) Note over Host,Equipment: Event Reporting Equipment->>Host: S6F11 W (ProcessCompleted) Note right of Equipment: ProcessStateChange ProcessResult ProcessData Host-->>Equipment: S6F12 (ACKC6=0) end

4. Detailed Sequence¶

4.1 Normal Process Completion¶

sequenceDiagram participant Host participant Equipment Note over Equipment: State: EXECUTING Note over Equipment: Final process step... Note over Equipment: Collect measurement data Note over Equipment: State: IDLE Equipment->>Host: S6F11 W (CEID=102) Note right of Equipment: DATAID=12345 CEID=102 (ProcessCompleted) Reports: ProcessEnd, ProcessData Host-->>Equipment: S6F12 (ACKC6=0) Note over Host,Equipment: Additional data collection (optional) Host->>Equipment: S6F15 W (Request detailed data) Equipment-->>Host: S6F16 (Detailed process data)

4.2 S6F11 Message Structure¶

S6F11 W
<L[3]
  <DATAID 12345>
  <CEID 102>              // ProcessCompleted
  <L[2]
    <L[2]
      <RPTID 12>          // RPT_ProcessEnd
      <L[6]
        <PPID "RECIPE001">
        <LOTID "LOT001">
        <SLOTID 5>
        <ProcessTime 120>  // seconds
        <ProcessResult 0>  // 0=OK, 1=NG
        <Clock "20241231120000">
      >
    >
    <L[2]
      <RPTID 50>          // RPT_ProcessData
      <L[n]
        // Process measurement data
        <Measurement1 123.45>
        <Measurement2 67.89>
        ...
      >
    >
  >
>

5. Process Result Codes¶

ProcessResult	Description
0	Process completed successfully
1	Process completed with errors
2	Process incomplete
3	Process aborted

6. Data Collection¶

6.1 Automatic Data (via Event Report)¶

Data automatically included in ProcessCompleted event:

Variable	Type	Description
RecipeID	A	Recipe used
LotID	A	Lot identifier
SlotID	U2	Slot number
ProcessTime	U4	Duration (seconds)
ProcessResult	U1	Result code
StartTime	A	Process start time
EndTime	A	Process end time

6.2 Measurement Data¶

Variable	Type	Units	Description
`[Measurement1]`	F4	`[unit]`	`[Description]`
`[Measurement2]`	F4	`[unit]`	`[Description]`

6.3 On-Demand Data Query¶

Host can request additional data after completion:

sequenceDiagram participant Host participant Equipment Host->>Equipment: S6F15 W Note right of Host: Request data for specific DVIDs Equipment-->>Host: S6F16 (Data values)

7. Multi-Unit Processing¶

For equipment processing multiple units (e.g., wafers):

7.1 Per-Unit Completion¶

sequenceDiagram participant Host participant Equipment Note over Equipment: Processing Slot 1 Equipment->>Host: S6F11 W (SlotCompleted) Note right of Equipment: CEID=110, Slot=1, Result=OK Host-->>Equipment: S6F12 Note over Equipment: Processing Slot 2 Equipment->>Host: S6F11 W (SlotCompleted) Note right of Equipment: CEID=110, Slot=2, Result=OK Host-->>Equipment: S6F12 Note over Equipment: All slots complete Equipment->>Host: S6F11 W (ProcessCompleted) Note right of Equipment: CEID=102, Summary data Host-->>Equipment: S6F12

7.2 Summary Report Structure¶

S6F11 W
<L[3]
  <DATAID>
  <CEID 102>
  <L[1]
    <L[2]
      <RPTID 99>          // RPT_BatchSummary
      <L[3]
        <TotalProcessed 25>
        <TotalPassed 24>
        <TotalFailed 1>
      >
    >
  >
>

8. Error Scenarios¶

8.1 Process Completed with Errors¶

sequenceDiagram participant Host participant Equipment Note over Equipment: Process error detected Equipment->>Host: S5F1 W (Alarm Set) Note right of Equipment: ALID=3001 ALTX="Process Error" Host-->>Equipment: S5F2 Note over Equipment: Process continues/recovers Note over Equipment: State: IDLE Equipment->>Host: S6F11 W (ProcessCompleted) Note right of Equipment: ProcessResult=1 (with errors) Host-->>Equipment: S6F12

8.2 Process Aborted¶

sequenceDiagram participant Host participant Equipment Note over Equipment: Abort triggered Note over Equipment: State: ABORTING Equipment->>Host: S6F11 W (ProcessStateChange) Host-->>Equipment: S6F12 Note over Equipment: State: IDLE Equipment->>Host: S6F11 W (ProcessAborted) Note right of Equipment: CEID=103 AbortReason="Operator request" Host-->>Equipment: S6F12

9. Host Acknowledgment Failure¶

9.1 No S6F12 Response¶

sequenceDiagram participant Host participant Equipment Equipment->>Host: S6F11 W (ProcessCompleted) Note over Equipment: Wait for S6F12 Note over Equipment: T3 timeout Note over Equipment: Message queued for retry Note over Equipment: Or spooled if comm lost

9.2 Spooling Scenario¶

If communication is lost during event reporting:

sequenceDiagram participant Host participant Equipment Equipment->>Host: S6F11 W (ProcessCompleted) Note over Host,Equipment: Communication Lost Note over Equipment: Spool message Note over Host,Equipment: Later: Communication Restored Equipment->>Host: S6F23 (Request spool transmit) Host-->>Equipment: S6F24 (Grant) Equipment->>Host: S6F11 (Spooled message) Host-->>Equipment: S6F12

CEID	Name	Trigger
100	ProcessStateChange	Any process state change
101	ProcessStarted	Process execution begins
102	ProcessCompleted	Process completes normally
103	ProcessAborted	Process aborted
110	SlotCompleted	Individual slot/unit complete
111	SlotFailed	Individual slot/unit failed

11. Timing Considerations¶

Event	Timing
ProcessCompleted event	Immediately after state → IDLE
Measurement data available	At time of event
Historical data retention	`[configurable]`