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GEM 300 Overview

1. Introduction

GEM 300 refers to the extended set of SEMI standards designed for 300mm wafer manufacturing. These standards build upon the base GEM (SEMI E30) capabilities to support advanced automation requirements.

2. GEM 300 Standards

Standard Name Description
SEMI E39 Object Services Foundation for object-oriented equipment modeling
SEMI E40 Process Job Management (PJM) Process job creation, control, and monitoring
SEMI E87 Carrier Management (CMS) Carrier/FOUP handling and tracking
SEMI E90 Substrate Tracking Individual substrate location and history
SEMI E94 Control Job Management (CJM) Control job scheduling and management
SEMI E116 Equipment Performance Tracking Equipment metrics and performance data
SEMI E157 Module Process Tracking Process tracking at module level

3. GEM 300 vs GEM 200 Comparison

Feature GEM 200 GEM 300
Wafer Size 200mm 300mm
Carrier Type Open Cassette FOUP (Closed)
Material Handling Manual/Semi-Auto Fully Automated
Substrate Tracking Basic Full tracking with history
Job Management Recipe-based Process Job + Control Job
Object Model Stream/Function Object Services

4. Architecture Overview

flowchart TB subgraph Host["Host System"] MES[MES/FDC] end subgraph Equipment["Equipment"] subgraph GEM300["GEM 300 Layer"] CJM[Control Job<br/>E94] PJM[Process Job<br/>E40] CMS[Carrier Mgmt<br/>E87] ST[Substrate Track<br/>E90] ETS[Terminal Svc<br/>E116] end subgraph GEM200["GEM 200 Base"] RC[Remote Cmd] DV[Data Collection] ALM[Alarms] PP[Recipes] end subgraph HW["Hardware"] LP[Load Ports] PM[Process Modules] TM[Transfer Module] end end MES <-->|SECS/GEM| GEM300 GEM300 --> GEM200 GEM200 --> HW

5. Object Services (SEMI E39)

GEM 300 uses object-oriented modeling where equipment components are represented as objects.

5.1 Object Types

Object Type Description
Equipment Root equipment object
LoadPort Carrier loading position
Carrier FOUP/container
Substrate Individual wafer
ProcessJob Process job instance
ControlJob Control job instance

5.2 Object Relationships

flowchart TD EQP[Equipment] --> LP[LoadPort 1..n] EQP --> PM[ProcessModule 1..n] LP --> CA[Carrier 0..1] CA --> SUB[Substrate 0..25] CJ[ControlJob] --> PJ[ProcessJob 1..n] PJ --> SUB

6. OBJACK - Object Acknowledge

GEM 300 uses OBJACK for object service responses:

Value Description
0 Successful completion
1 Invalid object type
2 Object not found
3 Invalid attribute name
4 Read-only attribute
5 Invalid format

7. GEM 300 Message Streams

Stream Description Related Standard
S3 Material Status E87 (CMS)
S12 Wafer Mapping E87
S14 Object Services E39
S15 Recipe Management E40/E94
S16 Process Job E40

8. Implementation Roadmap

8.1 Minimum GEM 300 Implementation

  1. Carrier Management (E87)
  2. Load port state model
  3. Carrier state model

  4. Access mode control

  5. Process Job Management (E40)

  6. Process job state model
  7. Material out spec
  8. Recipe specification

8.2 Full GEM 300 Implementation

Add to minimum:

  1. Control Job Management (E94)
  2. Control job state model

  3. Job scheduling

  4. Substrate Tracking (E90)

  5. Location tracking

  6. History tracking

  7. Equipment Terminal Services (E116)

  8. Operator messaging
  9. Display services

9. Key Differences in Operation

9.1 Material Flow

GEM 200: 

Operator → Load Cassette → Manual Start → Process → Unload

GEM 300: 

AMHS → Deliver FOUP → Auto Dock → Create Job → Process → Undock → AMHS Pickup

9.2 Job Hierarchy

flowchart TD CJ[Control Job] -->|Contains| PJ1[Process Job 1] CJ -->|Contains| PJ2[Process Job 2] PJ1 -->|Processes| W1[Wafer 1-5] PJ2 -->|Processes| W2[Wafer 6-10]

10. Supported SEMI Standards

Standard Version Support Level
SEMI E39 [version] Full
SEMI E40 [version] Full
SEMI E87 [version] Full
SEMI E90 [version] [Full/Partial]
SEMI E94 [version] Full
SEMI E116 [version] [Full/Partial]
Chapter Content
21 Carrier State Model (E87)
22 Load Port State Model (E87)
23 Access Mode (E87)
24 Process Job State (E40)
25 Control Job State (E94)
26 Substrate Tracking (E90)
27 Equipment Terminal Services (E116)