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Carrier State Model (SEMI E87)

1. Overview

The Carrier State Model defines the lifecycle of a carrier (FOUP) within the equipment, from arrival to departure, as specified in SEMI E87 (Carrier Management System - CMS).

2. Carrier State Diagram

stateDiagram-v2 [*] --> NOT_INSTANTIATED NOT_INSTANTIATED --> ID_NOT_READ: Carrier arrives at LP ID_NOT_READ --> ID_VERIFICATION_OK: ID read success ID_NOT_READ --> ID_VERIFICATION_FAILED: ID read failed ID_VERIFICATION_FAILED --> ID_NOT_READ: Retry read ID_VERIFICATION_FAILED --> NOT_INSTANTIATED: Carrier removed state IN_ACCESS_STATES { ID_VERIFICATION_OK --> NOT_ACCESSED: Waiting for access NOT_ACCESSED --> IN_ACCESS: Access granted IN_ACCESS --> CARRIER_COMPLETE: Processing done CARRIER_COMPLETE --> NOT_ACCESSED: Ready for unload } IN_ACCESS --> NOT_ACCESSED: Access cancelled NOT_ACCESSED --> ID_VERIFICATION_OK: Re-verify required CARRIER_COMPLETE --> NOT_INSTANTIATED: Carrier removed NOT_ACCESSED --> NOT_INSTANTIATED: Carrier removed

3. State Definitions

State Description
NOT_INSTANTIATED No carrier present at load port
ID_NOT_READ Carrier present, ID not yet read
ID_VERIFICATION_OK Carrier ID successfully read and verified
ID_VERIFICATION_FAILED Carrier ID read failed or verification error
NOT_ACCESSED Carrier verified, not currently being accessed
IN_ACCESS Carrier door open, substrates accessible
CARRIER_COMPLETE All processing complete, ready for unload

4. Transition Table

# From State Trigger To State Action
1 NOT_INSTANTIATED Carrier placed on LP ID_NOT_READ Initiate ID read
2 ID_NOT_READ ID read success ID_VERIFICATION_OK Store carrier info
3 ID_NOT_READ ID read failed ID_VERIFICATION_FAILED Report error
4 ID_VERIFICATION_FAILED Retry ID read ID_NOT_READ Attempt read again
5 ID_VERIFICATION_FAILED Carrier removed NOT_INSTANTIATED Clear carrier data
6 ID_VERIFICATION_OK Wait for access NOT_ACCESSED Carrier ready
7 NOT_ACCESSED Access command IN_ACCESS Open door, clamp
8 IN_ACCESS Processing complete CARRIER_COMPLETE Set complete flag
9 IN_ACCESS Cancel access NOT_ACCESSED Close door
10 CARRIER_COMPLETE Unload command NOT_ACCESSED Prepare for removal
11 NOT_ACCESSED Carrier removed NOT_INSTANTIATED Clear carrier data
12 CARRIER_COMPLETE Carrier removed NOT_INSTANTIATED Clear carrier data

5. Carrier Attributes

Attribute Type Description
CarrierID A Unique carrier identifier (from RFID/barcode)
CarrierType A Type of carrier (FOUP, FOSB, etc.)
LocationID A Current load port ID
ContentMap L Substrate presence map
SlotCount U1 Number of slots in carrier
CarrierState U1 Current state value
AccessMode U1 Current access mode

5.1 Carrier State Values

Value State
0 NOT_INSTANTIATED
1 ID_NOT_READ
2 ID_VERIFICATION_OK
3 ID_VERIFICATION_FAILED
4 NOT_ACCESSED
5 IN_ACCESS
6 CARRIER_COMPLETE
Message Direction Description
S3F17 H→E Carrier Action Request (Bind/Cancel Bind/Proc Cancel)
S3F18 E→H Carrier Action Acknowledge
S3F25 H→E Carrier ID Read/Verify
S3F26 E→H Carrier ID Read/Verify Acknowledge
S3F27 E→H Carrier ID Read Report
S3F28 H→E Carrier ID Read Report Acknowledge

6.1 S3F17 - Carrier Action Request

Structure: 

S3F17 W
<L[5]
  <DATAID>
  <CARRIERACTION>      // 1=Bind, 2=CancelBind, 3=ProceedWithCarrier, 4=CancelCarrier
  <CARRIERID>
  <PORTID>             // PTN (port number)
  <L[n]                // Additional attributes
    <L[2]
      <ATTRID>
      <ATTRDATA>
    >
    ...
  >
>

CARRIERACTION Values:

Value Action Description
1 BIND Associate carrier ID with location
2 CANCEL_BIND Remove carrier association
3 PROCEED_WITH_CARRIER Allow processing to continue
4 CANCEL_CARRIER_AT_PORT Cancel carrier operations
5 CANCEL_CARRIER_NOTIFICATION Cancel carrier notification

6.2 S3F18 - Carrier Action Acknowledge

Structure: 

S3F18
<L[2]
  <CAESSION>           // Carrier action result
  <L[n]                // Per-attribute status
    <L[2]
      <ATTRID>
      <ATTRDATA>
    >
    ...
  >
>

7. Carrier ID Verification

7.1 ID Read Sequence

sequenceDiagram participant Host participant Equipment Note over Equipment: Carrier placed on LP Equipment->>Host: S3F27 (Carrier ID Read Report) Note right of Equipment: CarrierID="FOUP001"<br/>Status=Success Host-->>Equipment: S3F28 (Acknowledge) Note over Equipment: State: ID_VERIFICATION_OK Equipment->>Host: S6F11 (CarrierStateChange) Host-->>Equipment: S6F12

7.2 ID Verification Failed

sequenceDiagram participant Host participant Equipment Note over Equipment: ID read failed Equipment->>Host: S3F27 (Carrier ID Read Report) Note right of Equipment: Status=Failed Host-->>Equipment: S3F28 Note over Equipment: State: ID_VERIFICATION_FAILED opt Host provides ID Host->>Equipment: S3F17 (BIND, CarrierID) Equipment-->>Host: S3F18 (Success) Note over Equipment: State: ID_VERIFICATION_OK end

8. Content Map (Slot Map)

The carrier content map indicates substrate presence in each slot.

8.1 Slot Map Values

Value Description
0 Empty slot
1 Substrate present
2 Double slotted
3 Cross slotted
4 Unknown

8.2 Slot Map Read (S12F9/F10)

sequenceDiagram participant Host participant Equipment Host->>Equipment: S12F9 W (Request slot map) Equipment-->>Host: S12F10 (Slot map data) Note left of Equipment: SlotMap=[1,1,1,0,0,1,0,...]
CEID Name Description
[8001] CarrierArrived Carrier placed on load port
[8002] CarrierRemoved Carrier removed from load port
[8003] CarrierIDRead Carrier ID successfully read
[8004] CarrierIDReadFailed Carrier ID read failed
[8005] CarrierStateChange Carrier state transition
[8006] CarrierAccessing Carrier entering IN_ACCESS
[8007] CarrierComplete All substrates processed
ALID ALTX Category Description
[8001] Carrier ID Read Error Warning Unable to read carrier ID
[8002] Carrier Verify Error Warning Carrier ID mismatch
[8003] Carrier Map Error Warning Slot map read error

11. Complete Carrier Lifecycle

sequenceDiagram participant Host participant Equipment participant AMHS AMHS->>Equipment: Deliver FOUP to LP1 Note over Equipment: State: ID_NOT_READ Equipment->>Host: S3F27 (CarrierID="FOUP001") Host-->>Equipment: S3F28 Note over Equipment: State: ID_VERIFICATION_OK Equipment->>Host: S6F11 (CarrierIDRead) Host-->>Equipment: S6F12 Note over Equipment: State: NOT_ACCESSED Host->>Equipment: S3F17 (PROCEED_WITH_CARRIER) Equipment-->>Host: S3F18 Note over Equipment: State: IN_ACCESS Note over Equipment: Process substrates... Note over Equipment: State: CARRIER_COMPLETE Equipment->>Host: S6F11 (CarrierComplete) Host-->>Equipment: S6F12 Host->>Equipment: S3F17 (Carrier Action - unload) Equipment-->>Host: S3F18 Equipment->>AMHS: Request pickup AMHS->>Equipment: Remove FOUP Note over Equipment: State: NOT_INSTANTIATED