Access Mode (SEMI E87)¶

1. Overview¶

Access Mode determines who has the authority to initiate carrier/substrate operations at a load port. This is analogous to the Control State (Local/Remote) concept in GEM 200, but applied at the load port level.

2. Access Mode States¶

Mode	Description
MANUAL	Operator has control. Host commands are rejected.
AUTO	Host has control. Automatic operations allowed.

3. Access Mode State Diagram¶

stateDiagram-v2 [*] --> MANUAL MANUAL --> AUTO: Host requests AUTO<br/>& Operator approves AUTO --> MANUAL: Operator requests MANUAL<br/>OR Host requests MANUAL

4. Access Mode Behavior¶

4.1 MANUAL Mode¶

In MANUAL mode: - Operator controls carrier loading/unloading - Host cannot initiate carrier operations - Host can still read status and events - Operator can manually start processing

4.2 AUTO Mode¶

In AUTO mode: - Host controls carrier operations - AMHS integration active - Automatic carrier loading/unloading - Host-initiated processing via jobs

5. Access Mode Transition¶

5.1 Manual to Auto¶

sequenceDiagram participant Host participant Equipment participant Operator Note over Equipment: Mode: MANUAL Host->>Equipment: S3F21 W (Request AUTO, Port=1) opt Operator Approval Required Equipment->>Operator: Request mode change Operator->>Equipment: Approve end Equipment-->>Host: S3F22 (Success) Note over Equipment: Mode: AUTO Equipment->>Host: S6F11 (AccessModeChange) Host-->>Equipment: S6F12

5.2 Auto to Manual¶

sequenceDiagram participant Host participant Equipment participant Operator Note over Equipment: Mode: AUTO alt Host Initiated Host->>Equipment: S3F21 W (Request MANUAL) Equipment-->>Host: S3F22 (Success) else Operator Initiated Operator->>Equipment: Switch to MANUAL end Note over Equipment: Mode: MANUAL Equipment->>Host: S6F11 (AccessModeChange) Host-->>Equipment: S6F12

6.1 S3F21 - Port Access Mode Change Request¶

Structure:

S3F21 W
<L[3]
  <DATAID>
  <ACCESSMODE>         // 0=MANUAL, 1=AUTO
  <L[n]                // Port list
    <PORTID>
    ...
  >
>

6.2 S3F22 - Port Access Mode Change Acknowledge¶

Structure:

S3F22
<L[2]
  <ACCESSMODERESULT>   // Overall result
  <L[n]                // Per-port results
    <L[2]
      <PORTID>
      <PORTRESULT>
    >
    ...
  >
>

ACCESSMODERESULT Values:

Value	Description
0	Success
1	At least one port failed
2	All ports failed

7. Command Acceptance Matrix¶

Command	MANUAL	AUTO
Host Load Request	Rejected	Accepted
Host Unload Request	Rejected	Accepted
Operator Load	Accepted	Accepted
Operator Unload	Accepted	Accepted
Status Query	Accepted	Accepted
Event Reporting	Active	Active

SVID	Name	Type	Description
`[9101]`	Port1AccessMode	U1	LP1 access mode (0=MANUAL, 1=AUTO)
`[9102]`	Port2AccessMode	U1	LP2 access mode

CEID	Name	Description
`[9101]`	AccessModeChange	Access mode changed
`[9102]`	AccessModeManual	Changed to MANUAL
`[9103]`	AccessModeAuto	Changed to AUTO

10. Default Configuration¶

Parameter	Value
Initial Access Mode	`[MANUAL/AUTO]`
Operator Approval Required for AUTO	`[Yes/No]`
Per-Port vs. Equipment-Wide	Per-Port

11. Error Handling¶

Error Condition	Response
Carrier operation in progress	Mode change rejected
Operator does not approve	Mode change rejected
Invalid port	Port-specific error in S3F22

12. Integration with Control State¶

Access Mode works in conjunction with equipment Control State:

Control State	Access Mode	Behavior
ONLINE REMOTE	AUTO	Full host automation
ONLINE REMOTE	MANUAL	Host remote, but LP manual
ONLINE LOCAL	AUTO	Operator control, LP auto
ONLINE LOCAL	MANUAL	Full operator control