Control Job State Model (SEMI E94)¶

1. Overview¶

The Control Job (CJ) State Model defines the lifecycle of a control job as specified in SEMI E94 (Control Job Management). A control job is a higher-level job that manages one or more process jobs and provides scheduling control.

2. Control Job vs Process Job¶

Aspect	Control Job (E94)	Process Job (E40)
Level	Higher (scheduling)	Lower (execution)
Scope	Multiple PJs	Single recipe execution
Purpose	Scheduling, grouping	Actual processing
Contains	1..n Process Jobs	Substrates

3. Control Job State Diagram¶

stateDiagram-v2 [*] --> QUEUED: Create Job QUEUED --> SELECTED: Select command QUEUED --> [*]: Delete SELECTED --> EXECUTING: Start / Auto-start SELECTED --> QUEUED: Deselect SELECTED --> [*]: Delete EXECUTING --> PAUSED: Pause command EXECUTING --> COMPLETED: All PJs complete EXECUTING --> WAITING_FOR_START: Hold PAUSED --> EXECUTING: Resume command PAUSED --> WAITING_FOR_START: Hold WAITING_FOR_START --> EXECUTING: Start command WAITING_FOR_START --> PAUSED: Pause COMPLETED --> [*]: Job removed

4. State Definitions¶

State	Description
QUEUED	Job created but not selected for execution
SELECTED	Job selected, ready to start
WAITING_FOR_START	Job held, waiting for explicit start
EXECUTING	Job is running (process jobs executing)
PAUSED	Job execution paused
COMPLETED	All process jobs completed

5. Transition Table¶

#	From State	Trigger	To State	Action
1	-	CJCreate	QUEUED	Create job instance
2	QUEUED	CJSelect	SELECTED	Select for execution
3	QUEUED	CJDelete	(removed)	Delete job
4	SELECTED	CJStart	EXECUTING	Start process jobs
5	SELECTED	Auto-start	EXECUTING	Start automatically
6	SELECTED	CJDeselect	QUEUED	Deselect job
7	SELECTED	CJDelete	(removed)	Delete job
8	EXECUTING	CJPause	PAUSED	Pause processing
9	EXECUTING	All PJs done	COMPLETED	Job complete
10	EXECUTING	CJHold	WAITING_FOR_START	Hold execution
11	PAUSED	CJResume	EXECUTING	Resume processing
12	PAUSED	CJHold	WAITING_FOR_START	Hold execution
13	WAITING_FOR_START	CJStart	EXECUTING	Resume execution
14	WAITING_FOR_START	CJPause	PAUSED	Pause job

6. Control Job Attributes¶

Attribute	Type	Description
CJObjID	A	Unique control job identifier
CJState	U1	Current state value
ProcessingCtrlSpec	L	Processing control specification
PRJobList	L	List of contained process job IDs
StartMethod	U1	Manual/Auto start
DataCollectionPlan	A	Associated data collection plan
MtrlOutSpec	L	Material output specification

6.1 Control Job State Values¶

Value	State
1	QUEUED
2	SELECTED
3	WAITING_FOR_START
4	EXECUTING
5	PAUSED
6	COMPLETED

7. CJ-PJ Relationship¶

flowchart TD subgraph ControlJob["Control Job: CJ001"] CJS[State: EXECUTING] end subgraph ProcessJobs["Process Jobs"] PJ1[PJ001<br/>PROCESSING] PJ2[PJ002<br/>QUEUED] PJ3[PJ003<br/>QUEUED] end ControlJob --> PJ1 ControlJob --> PJ2 ControlJob --> PJ3

Message	Direction	Description
S14F9	H→E	CJCreate - Create control job
S14F10	E→H	CJCreate Acknowledge
S14F1	H→E	CJGetAttr - Get job attributes
S14F2	E→H	CJGetAttr Data
S14F3	H→E	CJCmd - Control job command
S14F4	E→H	CJCmd Acknowledge

8.1 S14F9 - CJCreate¶

Structure:

S14F9 W
<L[n]
  <OBJSPEC>            // Object specifier
  <L[m]                // Attributes
    <L[2]
      <ATTRID>
      <ATTRDATA>
    >
    ...
  >
>

8.2 S14F3 - CJCmd (Control Job Command)¶

Structure:

S14F3 W
<L[n]
  <CJCMD>              // Command
  <L[m]                // Job list
    <CJOBJID>
    ...
  >
  <L[k]                // Parameters
    ...
  >
>

CJCMD Values:

Value	Command	Description
1	SELECT	Select job for execution
2	DESELECT	Deselect job
3	START	Start job execution
4	PAUSE	Pause job
5	RESUME	Resume job
6	ABORT	Abort job
7	STOP	Stop job at safe point
8	DELETE	Delete job
9	HOLD	Hold job

9. Control Job Execution Sequence¶

sequenceDiagram participant Host participant Equipment Host->>Equipment: S14F9 W (CJCreate) Note right of Host: CJObjID="CJ001"<br/>ProcessJobs=[PJ001, PJ002] Equipment-->>Host: S14F10 (Success) Note over Equipment: CJ State: QUEUED Host->>Equipment: S14F3 W (SELECT) Equipment-->>Host: S14F4 (Success) Note over Equipment: CJ State: SELECTED Host->>Equipment: S14F3 W (START) Equipment-->>Host: S14F4 (Success) Note over Equipment: CJ State: EXECUTING Note over Equipment: Start PJ001 Equipment->>Host: S6F11 (PRJobStarted) Host-->>Equipment: S6F12 Note over Equipment: PJ001 complete, Start PJ002 Equipment->>Host: S6F11 (PRJobComplete) Host-->>Equipment: S6F12 Note over Equipment: PJ002 complete Equipment->>Host: S6F11 (PRJobComplete) Host-->>Equipment: S6F12 Note over Equipment: CJ State: COMPLETED Equipment->>Host: S6F11 (CJComplete) Host-->>Equipment: S6F12

10. Job Scheduling¶

10.1 Priority¶

Control jobs can be assigned priority for scheduling:

Priority	Description
1	Highest priority
2-9	Normal priorities
10	Lowest priority

10.2 Queue Management¶

Command	Effect
SELECT	Move from QUEUED to SELECTED
DESELECT	Move from SELECTED to QUEUED
Move Up	Increase priority in queue
Move Down	Decrease priority in queue

CEID	Name	Description
`[8001]`	CJCreated	Control job created
`[8002]`	CJStateChange	Control job state changed
`[8003]`	CJSelected	Control job selected
`[8004]`	CJStarted	Control job started
`[8005]`	CJCompleted	Control job completed
`[8006]`	CJPaused	Control job paused
`[8007]`	CJResumed	Control job resumed
`[8008]`	CJAborted	Control job aborted

SVID	Name	Type	Description
`[8001]`	ActiveCJCount	U2	Number of active control jobs
`[8002]`	SelectedCJID	A	Currently selected control job
`[8003]`	ExecutingCJID	A	Currently executing control job

13. Error Handling¶

Error Condition	Response
Invalid job ID	OBJACK error
Wrong state for command	S14F4 with error
PJ creation failed	CJ creation fails
Queue full	S14F10 with error