Substrate Tracking (SEMI E90)

1. Overview

Substrate Tracking (SEMI E90) provides the capability to track individual substrates (wafers) as they move through the equipment, including location history and processing history.

2. Tracking Concepts

Concept	Description
Substrate	Individual unit (wafer) being processed
SubstrateID	Unique identifier for each substrate
Location	Current physical position in equipment
History	Record of movements and processing events

3. Substrate Locations

Substrates can be located in various positions within the equipment:

Location Type	Examples
LoadPort	LP1_Slot01, LP2_Slot15
Aligner	ALIGNER1
Robot Arm	ROBOT1_ARM1, ROBOT2_ARM2
Process Chamber	PM1, PM2, PM3
Buffer	BUFFER1, BUFFER2
Transfer Module	TM_ARM1

4. Substrate State Diagram

stateDiagram-v2 [*] --> AT_SOURCE: Mapped in carrier AT_SOURCE --> IN_MOTION: Pick from carrier IN_MOTION --> AT_WORK: Place in chamber AT_WORK --> IN_MOTION: Pick from chamber IN_MOTION --> AT_DESTINATION: Place in carrier AT_DESTINATION --> [*]: Carrier removed IN_MOTION --> LOST: Robot error AT_WORK --> REJECTED: Process failed

5. Substrate Attributes

Attribute	Type	Description
SubstrateID	A	Unique identifier (e.g., wafer ID)
SubstrateIDType	U1	Type of ID (barcode, RFID)
SubstrateLocID	A	Current location
SubstrateLotID	A	Parent lot ID
SubstrateType	U1	Type (product, dummy, monitor)
SubstrateState	U1	Current state
SubstrateUsage	U1	Usage count
SourceCarrier	A	Original carrier ID
SourceSlot	U1	Original slot number

5.1 Substrate State Values

Value	State	Description
0	NOT_INSTANTIATED	Not tracked
1	AT_SOURCE	At original location
2	AT_WORK	At processing location
3	AT_DESTINATION	At final location
4	IN_MOTION	Being transferred
5	NEEDS_PROCESSING	Ready for next step
6	PROCESSED	Processing complete
7	REJECTED	Failed/rejected
8	STOPPED	Stopped mid-process

5.2 Substrate Type Values

Value	Type	Description
0	PRODUCT	Production wafer
1	DUMMY	Dummy wafer
2	MONITOR	Monitor/test wafer
3	FILLER	Filler wafer

6. Location Tracking Events

sequenceDiagram participant Host participant Equipment Note over Equipment: Wafer W001 at LP1_Slot05 Equipment->>Host: S6F11 (SubstrateLocationChange) Note right of Equipment: SubID=W001<br/>From=LP1_Slot05<br/>To=ROBOT_ARM1 Host-->>Equipment: S6F12 Equipment->>Host: S6F11 (SubstrateLocationChange) Note right of Equipment: SubID=W001<br/>From=ROBOT_ARM1<br/>To=PM1 Host-->>Equipment: S6F12 Note over Equipment: Processing in PM1... Equipment->>Host: S6F11 (SubstrateLocationChange) Note right of Equipment: SubID=W001<br/>From=PM1<br/>To=ROBOT_ARM1 Host-->>Equipment: S6F12 Equipment->>Host: S6F11 (SubstrateLocationChange) Note right of Equipment: SubID=W001<br/>From=ROBOT_ARM1<br/>To=LP2_Slot05 Host-->>Equipment: S6F12

7. Related Messages

Message	Direction	Description
S12F1	H→E	Map Data Type 1 Request
S12F2	E→H	Map Data Type 1 Response
S12F3	H→E	Map Data Type 2 Request
S12F4	E→H	Map Data Type 2 Response
S12F5	H→E	Map Data Type 3 Request
S12F6	E→H	Map Data Type 3 Response
S12F7	E→H	Map Data Send Type 1
S12F8	H→E	Map Data Acknowledge Type 1
S12F9	E→H	Map Data Send Type 2
S12F10	H→E	Map Data Acknowledge Type 2

7.1 Map Data Types

Type	Description	Data
Type 1	Bin summary	Bin counts
Type 2	Slot map	Slot status
Type 3	Die map	Die-level data

7.2 S12F4 - Map Data Type 2 (Slot Map)

Structure:

S12F4
<L[4]
  <MID>                // Material ID
  <IDTYP>              // ID type
  <FNLOC>              // Location
  <L[25]               // 25 slots
    <SLOTSTATUS>       // 0=Empty, 1=Occupied, etc.
    ...
  >
>

8. Substrate History

Equipment maintains history for each tracked substrate:

History Record	Content
Timestamp	When event occurred
Event Type	Move, Process, State change
Location	Where event occurred
Details	Recipe, chamber, result

8.1 History Query

sequenceDiagram participant Host participant Equipment Host->>Equipment: Request substrate history Note right of Host: SubstrateID="W001" Equipment-->>Host: History data Note left of Equipment: [10:00] AT_SOURCE LP1_Slot05<br/>[10:05] IN_MOTION ROBOT<br/>[10:06] AT_WORK PM1<br/>[10:30] PROCESSED PM1<br/>[10:31] IN_MOTION ROBOT<br/>[10:32] AT_DESTINATION LP2_Slot05

9. Related Collection Events

CEID	Name	Description
[6001]	SubstrateLocationChange	Substrate moved
[6002]	SubstrateStateChange	Substrate state changed
[6003]	SubstrateProcessStart	Processing started
[6004]	SubstrateProcessComplete	Processing completed
[6005]	SubstrateRejected	Substrate rejected
[6006]	SubstrateLost	Substrate location unknown

10. Related Status Variables

SVID	Name	Type	Description
[6001]	SubstrateCount	U2	Total tracked substrates
[6002]	SubstrateLoc_PM1	A	Substrate ID in PM1
[6003]	SubstrateLoc_PM2	A	Substrate ID in PM2
[6010]	LastMovedSubstrate	A	Last moved substrate ID

11. Tracking Configuration

Parameter	Value
Track by Carrier Slot	Yes
Track by Substrate ID	[Yes/No]
History Retention	[hours/days]
Real-time Events	Yes

12. Error Handling

Error Condition	Action
Substrate dropped	Mark as LOST, raise alarm
ID read failed	Use slot-based tracking
Double occupancy	Raise alarm
Missing substrate	Mark as LOST, stop processing