Skip to content

Equipment Terminal Services (SEMI E116)

1. Overview

Equipment Terminal Services (ETS) provides capabilities for host-to-equipment terminal communications, including operator messaging and display services, as defined in SEMI E116 and utilizing Stream 10 messages.

2. Terminal Services Capabilities

Capability Description
Terminal Display Display messages to operator
Terminal Input Request input from operator
Multi-line Display Display formatted multi-line messages
Broadcast Messages Send messages to all terminals

3. Terminal Concepts

Concept Description
TID Terminal ID - identifies display terminal
TEXT Message text to display
ACKC10 Acknowledgment code for terminal operations
Message Direction Description
S10F1 H→E Terminal Request
S10F2 E→H Terminal Request Acknowledge
S10F3 H→E Terminal Display, Single
S10F4 E→H Terminal Display, Single Acknowledge
S10F5 H→E Terminal Display, Multi-Block
S10F6 E→H Terminal Display Acknowledge
S10F7 E→H Terminal Input Request
S10F8 H→E Terminal Input Response
S10F9 H→E Broadcast Message
S10F10 E→H Broadcast Acknowledge

5. Terminal Display

5.1 Single Line Display (S10F3/S10F4)

sequenceDiagram participant Host participant Equipment Host->>Equipment: S10F3 W Note right of Host: TID=0<br/>TEXT="Process complete" Note over Equipment: Display message Equipment-->>Host: S10F4 (ACKC10=0)

S10F3 Structure: 

S10F3 W
<L[2]
  <TID>                // Terminal ID (0 = default)
  <TEXT>               // Message text
>

S10F4 Structure: 

S10F4
<ACKC10>               // 0=Success

5.2 Multi-Line Display (S10F5/S10F6)

S10F5 Structure: 

S10F5 W
<L[2]
  <TID>
  <L[n]                // Multiple lines
    <TEXT>             // Line 1
    <TEXT>             // Line 2
    ...
  >
>

5.3 Broadcast Message (S10F9/S10F10)

Send to all terminals:

sequenceDiagram participant Host participant Equipment Host->>Equipment: S10F9 W Note right of Host: TEXT="Emergency shutdown" Note over Equipment: Display on all terminals Equipment-->>Host: S10F10 (ACKC10=0)

6. Terminal Input

6.1 Request Input from Operator

sequenceDiagram participant Host participant Equipment participant Operator Equipment->>Host: S10F7 W Note left of Equipment: TID=0<br/>TEXT="Enter lot ID:" Note over Host: Wait for input Operator->>Host: "LOT001" Host-->>Equipment: S10F8 Note right of Host: TEXT="LOT001"

S10F7 Structure: 

S10F7 W
<L[2]
  <TID>                // Terminal ID
  <TEXT>               // Prompt text
>

S10F8 Structure: 

S10F8
<TEXT>                 // Operator input

7. ACKC10 Response Codes

Value Description
0 Accepted, display completed
1 Terminal not available
2 Message not displayed
3 Unknown terminal ID

8. Terminal Types

TID Terminal Description
0 Default Main equipment terminal
1 Operator Panel Operator interface
2 Engineering Engineering terminal
[n] Custom Equipment-specific terminals

9. Display Formatting

9.1 Supported Characters

Character Set Support
ASCII (7-bit) Required
Extended ASCII Optional
Unicode Optional

9.2 Display Limits

Parameter Limit
Line length [80] characters
Max lines (multi) [25] lines
Message timeout [configurable] seconds

10. Message Priorities

Priority Description Behavior
Normal Standard message Queue if busy
High Important message Interrupt current display
Critical Emergency Immediate display + alarm

11. Use Cases

11.1 Operator Guidance

sequenceDiagram participant Host participant Equipment Host->>Equipment: S10F5 W Note right of Host: "=== Recipe Change Required ==="<br/>"Current: RECIPE_A"<br/>"New: RECIPE_B"<br/>"Press CONFIRM to proceed" Equipment-->>Host: S10F6 (ACKC10=0)

11.2 Alarm Notification

sequenceDiagram participant Host participant Equipment Host->>Equipment: S10F9 W Note right of Host: "*** ALARM ***"<br/>"Chamber pressure out of range"<br/>"Action required" Equipment-->>Host: S10F10 (ACKC10=0)

11.3 Operator Input Request

sequenceDiagram participant Host participant Equipment participant Operator Note over Equipment: Need operator confirmation Equipment->>Host: S10F7 W Note left of Equipment: "Confirm recipe change (Y/N):" Host->>Operator: Display prompt Operator->>Host: "Y" Host-->>Equipment: S10F8 (TEXT="Y")
CEID Name Description
[5001] MessageDisplayed Message shown on terminal
[5002] OperatorInput Operator provided input
[5003] DisplayTimeout Message display timed out
SVID Name Type Description
[5001] TerminalCount U1 Number of terminals
[5002] TerminalAvailable Boolean Terminal available for display

14. Implementation Notes

14.1 Message Queue

  • Equipment should queue messages if terminal busy
  • Queue depth: [10] messages
  • FIFO processing for normal priority

14.2 Timeout Handling

  • Display timeout: [30] seconds default
  • Input timeout: [120] seconds default
  • Timeout results in S10F8 with empty TEXT

14.3 Integration with Alarms

Terminal messages can be coordinated with alarm reporting:

  1. Equipment raises alarm (S5F1)
  2. Host sends terminal message (S10F3) with guidance
  3. Operator acknowledges at equipment
  4. Equipment clears alarm (S5F1 clear)