Collection Events

1. Overview

Collection Events (CE) are notifications sent by the equipment to the host when significant events occur. Each event can have associated reports containing relevant data variables. Collection Events form the foundation of GEM's data collection capability, enabling real-time monitoring and factory automation.

1.1 Key Concepts

Term	Description
CEID	Collection Event ID - Unique identifier for each event
RPTID	Report ID - Defines which variables are collected
VID	Variable ID - Individual data variable (SV, EC, or DV)
DATAID	Data ID - Transaction identifier for the S6F11 message

1.2 Event Reporting Architecture

flowchart LR subgraph Equipment CE[Collection Event] --> RPT[Report] RPT --> VID1[Variable 1] RPT --> VID2[Variable 2] RPT --> VID3[Variable 3] end CE -->|S6F11| Host

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2. Collection Event Definitions

2.1 System Events (CEID 1-99)

CEID	Event Name	Description	Trigger Condition
1	EquipmentOffline	Equipment transitioned to OFFLINE	Control state = OFFLINE
2	EquipmentOnlineLocal	Equipment transitioned to ONLINE-LOCAL	Control state = ONLINE-LOCAL
3	EquipmentOnlineRemote	Equipment transitioned to ONLINE-REMOTE	Control state = ONLINE-REMOTE
4	ControlStateChange	Control state changed	Any control state transition
5	CommunicationEstablished	SECS-II communication established	S1F13/S1F14 accepted
6	CommunicationLost	Host communication lost	HSMS disconnect or T3 timeout
7	SpoolingActivated	Spooling started	Comm lost & spool enabled
8	SpoolingDeactivated	Spooling stopped	Comm restored & spool transmitted
9	SpoolingFull	Spool buffer full	Spool capacity exceeded
10	HeartbeatFail	Heartbeat failure detected	S1F1 no response

2.2 Operator Events (CEID 20-49)

CEID	Event Name	Description	Trigger Condition
20	OperatorLogin	Operator logged in	Successful authentication
21	OperatorLogout	Operator logged out	Logout or session timeout
22	OperatorCommandIssued	Operator issued command	Manual command input
23	OperatorRecipeSelect	Operator selected recipe	Recipe selection via HMI
24	OperatorModeChange	Operator changed equipment mode	Mode switch (AUTO/MANUAL)
25	OperatorAlarmAck	Operator acknowledged alarm	Alarm acknowledgment
26	OperatorParameterChange	Operator changed parameter	EC modification via HMI
27	OperatorMaintenanceStart	Maintenance mode entered	Maintenance key ON
28	OperatorMaintenanceEnd	Maintenance mode exited	Maintenance key OFF

2.3 Process Events (CEID 100-199)

CEID	Event Name	Description	Trigger Condition
100	ProcessStateChange	Process state changed	Any process state transition
101	ProcessStarted	Process execution started	Process begins
102	ProcessCompleted	Process completed successfully	Process ends normally
103	ProcessAborted	Process aborted	Process terminated abnormally
104	ProcessPaused	Process paused	Process hold condition
105	ProcessResumed	Process resumed	Process restart
106	ProcessStepChange	Process step changed	Recipe step transition
107	ProcessStepCompleted	Process step completed	Recipe step ends
108	WaitingForOperator	Waiting for operator input	Operator intervention required
109	WaitingForMaterial	Waiting for material	Material not present
110	ProcessIdleEntered	Entered IDLE state	Process ready, no job
111	ProcessSetupEntered	Entered SETUP state	Preparing for process
112	ProcessExecutingEntered	Entered EXECUTING state	Active processing
115	ProcessCycleStart	Process cycle started	Cycle begins
116	ProcessCycleEnd	Process cycle completed	Cycle ends
117	RecipeStepStart	Recipe step started	Step execution begins
118	RecipeStepEnd	Recipe step ended	Step execution ends

2.4 Material/Carrier Events (CEID 200-299)

CEID	Event Name	Description	Trigger Condition
200	MaterialReceived	Material arrived at equipment	Material detected at load port
201	MaterialRemoved	Material removed from equipment	Material removed from load port
202	SlotMapRead	Slot map reading completed	Mapping sequence complete
203	SlotMapReadFailed	Slot map reading failed	Mapping error
204	CarrierClamped	Carrier clamped	Clamp sensor ON
205	CarrierUnclamped	Carrier unclamped	Clamp sensor OFF
206	CarrierDocked	Carrier docked	Dock sensor ON
207	CarrierUndocked	Carrier undocked	Dock sensor OFF
208	CarrierIDRead	Carrier ID read	Barcode/RFID read success
209	CarrierIDReadFailed	Carrier ID read failed	Barcode/RFID read error
210	CarrierAccessModeChange	Access mode changed	Manual/Auto switch
220	SubstrateLocationChange	Substrate location changed	Substrate moved
221	SubstrateProcessStart	Substrate process started	Individual substrate begins
222	SubstrateProcessEnd	Substrate process ended	Individual substrate ends
223	SubstrateIDRead	Substrate ID read	Substrate ID verification
224	SubstrateIDMismatch	Substrate ID mismatch	ID verification failed

2.5 Alarm Events (CEID 300-399)

CEID	Event Name	Description	Trigger Condition
300	AlarmSet	Alarm condition detected	Any alarm activated
301	AlarmCleared	Alarm condition cleared	Any alarm deactivated
302	AlarmAcknowledged	Alarm acknowledged	Operator/Host ack
303	PersonalSafetyAlarm	Personal safety alarm set	Category 1 alarm
304	EquipmentSafetyAlarm	Equipment safety alarm set	Category 2 alarm
305	IrrecoverableError	Irrecoverable error	Category 5 alarm
306	WarningAlarm	Warning condition	Category 6 alarm

2.6 Recipe Events (CEID 400-499)

CEID	Event Name	Description	Trigger Condition
400	RecipeSelected	Recipe selected for processing	Recipe activated
401	RecipeStarted	Recipe execution started	Recipe begins
402	RecipeCompleted	Recipe execution completed	Recipe ends normally
403	RecipeAborted	Recipe execution aborted	Recipe terminated
404	RecipeUploaded	Recipe uploaded to host	S7F26 complete
405	RecipeDownloaded	Recipe downloaded from host	S7F3 complete
406	RecipeDeleted	Recipe deleted	S7F17 complete
407	RecipeCreated	New recipe created	Recipe saved
408	RecipeModified	Recipe modified	Recipe edited
409	RecipeVerified	Recipe verification complete	Checksum verified
410	RecipeVerificationFailed	Recipe verification failed	Checksum mismatch

2.7 Job Events (CEID 500-599)

CEID	Event Name	Description	Trigger Condition
500	ProcessJobCreated	Process job created	PRJob received
501	ProcessJobQueued	Process job queued	PRJob accepted
502	ProcessJobStarted	Process job started	PRJob execution begins
503	ProcessJobCompleted	Process job completed	PRJob ends normally
504	ProcessJobAborted	Process job aborted	PRJob terminated
505	ProcessJobPaused	Process job paused	PRJob hold
506	ProcessJobResumed	Process job resumed	PRJob restart
507	ProcessJobStateChange	Process job state changed	Any state transition
510	ControlJobCreated	Control job created	CJob received
511	ControlJobQueued	Control job queued	CJob accepted
512	ControlJobStarted	Control job started	CJob execution begins
513	ControlJobCompleted	Control job completed	CJob ends normally
514	ControlJobAborted	Control job aborted	CJob terminated
515	ControlJobStateChange	Control job state changed	Any state transition

2.8 Equipment Status Events (CEID 600-699)

CEID	Event Name	Description	Trigger Condition
600	EquipmentConstantChange	Equipment constant changed	EC value modified
601	ClockSync	Clock synchronized	Time update complete
602	SoftwareVersionChange	Software version changed	Software update
603	ConfigurationChange	Configuration changed	Config file modified
604	InitializationComplete	Equipment initialization complete	Boot sequence done
605	ShutdownInitiated	Equipment shutdown initiated	Shutdown command
610	LoadPortStateChange	Load port state changed	LP status change
611	RobotStatusChange	Robot status changed	Robot state change
612	ChamberStatusChange	Chamber status changed	Chamber state change
613	TemperatureChange	Temperature limit reached	Temp threshold
614	PressureChange	Pressure limit reached	Pressure threshold
615	UtilityStatusChange	Utility status changed	Utility alarm

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3. Report Definitions

3.1 System Reports (RPTID 1-9)

RPTID	Report Name	Variables (VIDs)
1	RPT_SystemState	Clock, ControlState, ProcessState, PreviousControlState
2	RPT_ControlState	Clock, ControlState, PreviousControlState
3	RPT_CommState	Clock, CommunicationState, ConnectedTime
4	RPT_SpoolState	Clock, SpoolState, SpoolCount, SpoolFullFlag
5	RPT_EquipmentStatus	Clock, ControlState, ProcessState, AlarmCount

3.2 Operator Reports (RPTID 10-19)

RPTID	Report Name	Variables (VIDs)
10	RPT_Operator	Clock, OperatorID, OperatorLevel
11	RPT_OperatorCmd	Clock, OperatorID, CommandID, CommandParam
12	RPT_OperatorRecipe	Clock, OperatorID, RecipeID, RecipeVersion
13	RPT_OperatorMaint	Clock, OperatorID, MaintenanceCode

3.3 Process Reports (RPTID 20-39)

RPTID	Report Name	Variables (VIDs)
20	RPT_ProcessState	Clock, ProcessState, PreviousProcessState
21	RPT_ProcessStart	Clock, ProcessJobID, RecipeID, LotID, StartSubstrateCount
22	RPT_ProcessEnd	Clock, ProcessJobID, RecipeID, LotID, ProcessTime, ProcessResult, ProcessedCount, GoodCount, BadCount
23	RPT_ProcessStep	Clock, ProcessJobID, StepNumber, StepName, StepTime
24	RPT_ProcessCycle	Clock, CycleNumber, CycleTime, CycleResult
25	RPT_ProcessParam	Clock, ProcessTemp, ProcessPressure, ProcessPower, ProcessTime

3.4 Material Reports (RPTID 40-59)

RPTID	Report Name	Variables (VIDs)
40	RPT_Material	Clock, CarrierID, LotID, PortID, MaterialStatus
41	RPT_SlotMap	Clock, CarrierID, PortID, SlotMap, SlotCount, SubstrateCount
42	RPT_Carrier	Clock, CarrierID, CarrierType, CarrierState, ContentMap
43	RPT_Substrate	Clock, SubstrateID, SubstrateType, SlotNumber, SubstrateState
44	RPT_SubstrateLoc	Clock, SubstrateID, PreviousLocation, CurrentLocation
45	RPT_SubstrateProc	Clock, SubstrateID, ProcessResult, ProcessData

3.5 Alarm Reports (RPTID 60-69)

RPTID	Report Name	Variables (VIDs)
60	RPT_Alarm	Clock, ALID, ALCD, ALTX, AlarmState
61	RPT_AlarmDetail	Clock, ALID, ALCD, ALTX, AlarmSetTime, AlarmSource, AlarmAction
62	RPT_AlarmSummary	Clock, ActiveAlarmCount, AlarmList

3.6 Recipe Reports (RPTID 70-79)

RPTID	Report Name	Variables (VIDs)
70	RPT_Recipe	Clock, RecipeID, RecipeVersion, RecipeStatus
71	RPT_RecipeTransfer	Clock, RecipeID, TransferDirection, TransferResult
72	RPT_RecipeVerify	Clock, RecipeID, VerifyResult, Checksum

3.7 Job Reports (RPTID 80-99)

RPTID	Report Name	Variables (VIDs)
80	RPT_ProcessJob	Clock, ProcessJobID, ProcessJobState, RecipeID, MtrlOrder
81	RPT_ControlJob	Clock, ControlJobID, ControlJobState, ProcessingCtrlSpec
82	RPT_JobComplete	Clock, JobID, JobType, JobResult, JobTime, ProcessedCount

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4. Event-Report Linking (Default Configuration)

4.1 System Event Links

CEID	Event Name	Linked RPTIDs
1	EquipmentOffline	1, 2
2	EquipmentOnlineLocal	1, 2
3	EquipmentOnlineRemote	1, 2
4	ControlStateChange	2
5	CommunicationEstablished	3
6	CommunicationLost	3
7	SpoolingActivated	4
8	SpoolingDeactivated	4

4.2 Process Event Links

CEID	Event Name	Linked RPTIDs
100	ProcessStateChange	20
101	ProcessStarted	20, 21
102	ProcessCompleted	20, 22
103	ProcessAborted	20, 22
106	ProcessStepChange	23

4.3 Material Event Links

CEID	Event Name	Linked RPTIDs
200	MaterialReceived	40
201	MaterialRemoved	40
202	SlotMapRead	41
208	CarrierIDRead	42
220	SubstrateLocationChange	44

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5. Event Configuration Messages

5.1 S2F33 - Define Report

Define which variables are included in a report.

S2F33 W
  <L[n]                         // n reports to define
    <L[2]
      <RPTID>                   // Report ID
      <L[m]                     // m variables in report
        <VID>                   // Variable ID
        ...
      >
    >
    ...
  >
.

Example - Define Custom Process Report:

S2F33 W
  <L[1]
    <L[2]
      <U4 100>                  // RPTID = 100 (custom)
      <L[6]
        <U4 1>                  // Clock
        <U4 201>                // RecipeID
        <U4 301>                // ProcessTemp
        <U4 302>                // ProcessPressure
        <U4 303>                // ProcessTime
        <U4 210>                // ProcessResult
      >
    >
  >
.

5.2 S2F34 - Define Report Acknowledge

S2F34
  <DRACK>                       // Define Report Ack Code
.

DRACK	Description
0x00	OK, accepted
0x01	Out of space
0x02	Invalid format
0x03	RPTID already defined
0x04	VID doesn't exist

5.3 S2F35 - Link Event Report

Link reports to collection events.

S2F35 W
  <L[n]                         // n events to configure
    <L[2]
      <CEID>                    // Collection Event ID
      <L[m]                     // m reports to link
        <RPTID>
        ...
      >
    >
    ...
  >
.

Example - Link Reports to Process Complete:

S2F35 W
  <L[1]
    <L[2]
      <U4 102>                  // CEID = ProcessCompleted
      <L[2]
        <U4 20>                 // RPT_ProcessState
        <U4 100>                // Custom process report
      >
    >
  >
.

5.4 S2F36 - Link Event Report Acknowledge

S2F36
  <LRACK>                       // Link Report Ack Code
.

LRACK	Description
0x00	OK, accepted
0x01	Out of space
0x02	Invalid format
0x03	CEID doesn't exist
0x04	RPTID doesn't exist

5.5 S2F37 - Enable/Disable Event Report

S2F37 W
  <L[2]
    <CEED>                      // 0=Disable, 1=Enable
    <L[n]                       // n events (empty=all)
      <CEID>
      ...
    >
  >
.

Example - Enable Specific Events:

S2F37 W
  <L[2]
    <Boolean 1>                 // Enable
    <L[5]
      <U4 101>                  // ProcessStarted
      <U4 102>                  // ProcessCompleted
      <U4 200>                  // MaterialReceived
      <U4 201>                  // MaterialRemoved
      <U4 300>                  // AlarmSet
    >
  >
.

Example - Enable All Events:

S2F37 W
  <L[2]
    <Boolean 1>                 // Enable
    <L[0]>                      // Empty = All events
  >
.

5.6 S2F38 - Enable/Disable Event Report Acknowledge

S2F38
  <ERACK>                       // Event Report Ack Code
.

ERACK	Description
0x00	OK, accepted
0x01	CEID doesn't exist

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6. Event Notification (S6F11/S6F12)

6.1 S6F11 - Event Report Send

S6F11 W
  <L[3]
    <DATAID>                    // Data ID (transaction ID)
    <CEID>                      // Collection Event ID
    <L[n]                       // n linked reports
      <L[2]
        <RPTID>                 // Report ID
        <L[m]                   // m variables
          <V>                   // Variable value
          ...
        >
      >
      ...
    >
  >
.

6.2 S6F11 Examples

Example 1 - Process Completed Event:

S6F11 W
  <L[3]
    <U4 12345>                          // DATAID
    <U4 102>                            // CEID = ProcessCompleted
    <L[2]
      <L[2]
        <U4 20>                         // RPTID = RPT_ProcessState
        <L[2]
          <A[14] "20250101143022">      // Clock
          <U1 1>                        // ProcessState = IDLE
        >
      >
      <L[2]
        <U4 22>                         // RPTID = RPT_ProcessEnd
        <L[9]
          <A[14] "20250101143022">      // Clock
          <A[20] "PJOB_20250101_001">   // ProcessJobID
          <A[20] "RECIPE_PROD_A">       // RecipeID
          <A[20] "LOT_2025_0001">       // LotID
          <U4 3600>                     // ProcessTime (sec)
          <U1 0>                        // ProcessResult (0=OK)
          <U4 25>                       // ProcessedCount
          <U4 24>                       // GoodCount
          <U4 1>                        // BadCount
        >
      >
    >
  >
.

Example 2 - Material Received Event:

S6F11 W
  <L[3]
    <U4 12346>                          // DATAID
    <U4 200>                            // CEID = MaterialReceived
    <L[1]
      <L[2]
        <U4 40>                         // RPTID = RPT_Material
        <L[5]
          <A[14] "20250101090000">      // Clock
          <A[20] "CARRIER_001">         // CarrierID
          <A[20] "LOT_2025_0002">       // LotID
          <U1 1>                        // PortID
          <U1 1>                        // MaterialStatus (1=Present)
        >
      >
    >
  >
.

Example 3 - Alarm Set Event:

S6F11 W
  <L[3]
    <U4 12347>                          // DATAID
    <U4 300>                            // CEID = AlarmSet
    <L[1]
      <L[2]
        <U4 60>                         // RPTID = RPT_Alarm
        <L[5]
          <A[14] "20250101102530">      // Clock
          <U4 3001>                     // ALID
          <B[1] 0x86>                   // ALCD (Set + Cat 6)
          <A[30] "Temperature High Warning">  // ALTX
          <U1 1>                        // AlarmState (1=Active)
        >
      >
    >
  >
.

6.3 S6F12 - Event Report Acknowledge

S6F12
  <ACKC6>                       // Acknowledge Code
.

ACKC6	Description
0x00	Accepted
0x01-0x3F	Error (see Appendix B)

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7. Event Query Messages

7.1 S6F15 - Event Report Request

Request current values for an event's linked variables.

S6F15 W
  <CEID>                        // Collection Event ID
.

7.2 S6F16 - Event Report Data

S6F16
  <L[3]
    <DATAID>
    <CEID>
    <L[n]                       // Report data (same as S6F11)
      <L[2]
        <RPTID>
        <L[m]
          <V>
          ...
        >
      >
      ...
    >
  >
.

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8. Event Flow Sequences

8.1 Initial Event Configuration

sequenceDiagram participant H as Host participant E as Equipment Note over H,E: After Communication Established H->>E: S2F33 W (Define Reports) E-->>H: S2F34 (DRACK=0) H->>E: S2F35 W (Link Events to Reports) E-->>H: S2F36 (LRACK=0) H->>E: S2F37 W (Enable Events) E-->>H: S2F38 (ERACK=0) Note over H,E: Events Now Active

8.2 Process Complete Event Flow

sequenceDiagram participant H as Host participant E as Equipment Note over E: Process Completes E->>H: S6F11 W (CEID=102, ProcessCompleted) Note right of E: Contains:<br/>- ProcessJobID<br/>- RecipeID<br/>- ProcessResult<br/>- ProcessTime H-->>E: S6F12 (ACKC6=0) Note over H: Host logs result<br/>and updates MES

8.3 Carrier Arrival Event Flow

sequenceDiagram participant H as Host participant E as Equipment Note over E: Carrier Placed on Port E->>H: S6F11 W (CEID=200, MaterialReceived) H-->>E: S6F12 (ACKC6=0) E->>H: S6F11 W (CEID=208, CarrierIDRead) Note right of E: Contains CarrierID H-->>E: S6F12 (ACKC6=0) E->>H: S6F11 W (CEID=202, SlotMapRead) Note right of E: Contains SlotMap H-->>E: S6F12 (ACKC6=0)

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9. Implementation Guidelines

9.1 Event Enable State

Default State	Events
Always Enabled	ControlStateChange, AlarmSet, AlarmCleared
Enabled	ProcessStarted, ProcessCompleted, MaterialReceived
Disabled	ProcessStepChange, SubstrateLocationChange

9.2 Event Queue Management

Parameter	Typical Value	Description
MaxQueueSize	1000	Maximum queued events
QueueOverflowAction	DropOldest	What to do when full
EventTimeout	45 sec	T3 timeout for S6F12

9.3 Multi-Report Events

A single event can trigger multiple reports. This is useful for: - Combining state data with process data - Including both summary and detail information - Supporting different host requirements

9.4 Trace Data Alternative

For high-frequency data collection (>1 Hz), use Trace Data (S2F23/S6F1) instead of Collection Events to avoid message flooding.

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10. Implementation Checklist

Feature	Required	Notes
S6F11/F12 Event Send	Yes	Core event reporting
S2F33/F34 Define Report	Yes	Report configuration
S2F35/F36 Link Event	Yes	Event-report linking
S2F37/F38 Enable Event	Yes	Event enable/disable
S6F15/F16 Event Query	Optional	On-demand query
Event Queue	Yes	Buffer during host delay
Spool Support	Yes	Events during comm loss
Default Event Set	Yes	Factory default config