GEM 300 Message Streams¶

Overview¶

GEM 300 uses additional message streams for carrier management, substrate tracking, object services, and job management.

Stream Summary¶

Stream	Description	Related Standard
S3	Material Status	E87 (CMS)
S12	Wafer Mapping	E87/E90
S14	Object Services	E39/E94
S16	Process Job	E40

Stream 3 - Material Status (E87)¶

Key Messages¶

Message	Name	Direction	Description
S3F17	Carrier Action Request	H→E	Carrier action command
S3F18	Carrier Action Acknowledge	E→H	Action response
S3F21	Port Access Mode Change	H→E	Change access mode
S3F22	Port Access Mode Ack	E→H	Mode change response
S3F23	Port Action Request	H→E	Port action command
S3F24	Port Action Acknowledge	E→H	Action response
S3F25	Carrier ID Verify	H→E	Verify carrier ID
S3F26	Carrier ID Verify Ack	E→H	Verify response
S3F27	Carrier ID Report	E→H	Report carrier ID
S3F28	Carrier ID Report Ack	H→E	Report acknowledge

S3F17 - Carrier Action Request¶

Structure¶

S3F17 W
<L[5]
  <DATAID U4>
  <CARRIERACTION U1>
  <CARRIERID A>
  <PORTID U1>
  <L[n]              // Attributes
    <L[2]
      <ATTRID A>
      <ATTRDATA>
    >
    ...
  >
>

CARRIERACTION Values¶

Value	Action
1	BIND
2	CANCEL_BIND
3	PROCEED_WITH_CARRIER
4	CANCEL_CARRIER_AT_PORT
5	CANCEL_CARRIER_NOTIFICATION

S3F21 - Port Access Mode Change¶

Structure¶

S3F21 W
<L[3]
  <DATAID U4>
  <ACCESSMODE U1>    // 0=MANUAL, 1=AUTO
  <L[n]
    <PORTID U1>
    ...
  >
>

S3F27 - Carrier ID Report¶

Structure¶

S3F27 W
<L[4]
  <PORTID U1>
  <CARRIERID A>
  <IDREADSTATUS U1>  // 0=Success, 1=Failed
  <L[n]              // Additional attributes
    <L[2]
      <ATTRID A>
      <ATTRDATA>
    >
    ...
  >
>

Stream 12 - Wafer Mapping¶

Key Messages¶

Message	Name	Direction	Description
S12F1	Map Data Type 1 Request	H→E	Request bin summary
S12F2	Map Data Type 1	E→H	Return bin summary
S12F3	Map Data Type 2 Request	H→E	Request slot map
S12F4	Map Data Type 2	E→H	Return slot map
S12F5	Map Data Type 3 Request	H→E	Request die map
S12F6	Map Data Type 3	E→H	Return die map
S12F7	Map Data Send Type 1	E→H	Send bin summary
S12F8	Map Data Ack Type 1	H→E	Acknowledge
S12F9	Map Data Send Type 2	E→H	Send slot map
S12F10	Map Data Ack Type 2	H→E	Acknowledge

S12F4 - Map Data Type 2 (Slot Map)¶

Structure¶

S12F4
<L[4]
  <MID A>            // Material ID
  <IDTYP U1>         // ID type
  <FNLOC U2>         // Function location
  <L[n]              // Slot status (n slots)
    <SLOTSTATUS U1>  // Per-slot status
    ...
  >
>

SLOTSTATUS Values¶

Value	Status
0	Empty
1	Occupied
2	Double slotted
3	Cross slotted
4	Unknown

Stream 14 - Object Services (E39/E94)¶

Key Messages¶

Message	Name	Direction	Description
S14F1	Get Attributes Request	H→E	Query object attributes
S14F2	Get Attributes Data	E→H	Return attributes
S14F3	Object Command	H→E	Command to object
S14F4	Object Command Ack	E→H	Command response
S14F9	Create Object Request	H→E	Create object (CJ)
S14F10	Create Object Ack	E→H	Create response

S14F3 - Object Command (Control Job)¶

Structure¶

S14F3 W
<L[3]
  <OBJSPEC A>        // Object specifier
  <CJCMD U1>         // Command
  <L[n]              // Parameters
    <L[2]
      <CPNAME A>
      <CPVAL>
    >
    ...
  >
>

CJCMD Values¶

Value	Command
1	SELECT
2	DESELECT
3	START
4	PAUSE
5	RESUME
6	ABORT
7	STOP
8	DELETE
9	HOLD

S14F9 - Create Object Request¶

Structure¶

S14F9 W
<L[2]
  <OBJSPEC A>
  <L[n]              // Attributes
    <L[2]
      <ATTRID A>
      <ATTRDATA>
    >
    ...
  >
>

Stream 16 - Process Job (E40)¶

Key Messages¶

Message	Name	Direction	Description
S16F11	PRCreateJob	H→E	Create process job
S16F12	PRCreateJob Ack	E→H	Create response
S16F15	PRMultiCreate	H→E	Create multiple jobs
S16F16	PRMultiCreate Ack	E→H	Multi-create response
S16F17	PRJobCommand	H→E	Command to job
S16F18	PRJobCommand Ack	E→H	Command response
S16F19	PRGetAllJobs	H→E	Get job list
S16F20	PRGetAllJobs Data	E→H	Return job list
S16F21	PRGetJobInfo	H→E	Get job details
S16F22	PRGetJobInfo Data	E→H	Return job details

S16F11 - PRCreateJob¶

Structure¶

S16F11 W
<L[5]
  <DATAID U4>
  <PRJOBID A>        // Process job ID
  <PRMTLTYPE U1>     // 0=Carrier, 1=Substrate
  <L[n]              // Material list
    <MTLID A>
    ...
  >
  <L[m]              // Attributes
    <L[2]
      <ATTRID A>
      <ATTRDATA>
    >
    ...
  >
>

Common Attributes¶

Attribute	Description
RecID	Recipe ID
PRProcessStart	Auto-start flag
CarrierInputSpec	Input carrier spec
MtrlOutSpec	Material output spec

S16F17 - PRJobCommand¶

Structure¶

S16F17 W
<L[3]
  <PRCMD U1>         // Command
  <L[n]              // Job list
    <PRJOBID A>
    ...
  >
  <L[m]              // Parameters
    <L[2]
      <CPNAME A>
      <CPVAL>
    >
    ...
  >
>

PRCMD Values¶

Value	Command
1	START
2	PAUSE
3	RESUME
4	CANCEL
5	DEQUEUE
6	ABORT
7	STOP

S16F18 - PRJobCommand Acknowledge¶

Structure¶

S16F18
<L[2]
  <ACKA B[1]>        // 0=Success, 1=Fail
  <L[n]              // Per-job results
    <L[2]
      <PRJOBID A>
      <PRJOBRESULT U1>
    >
    ...
  >
>

Common Response Codes¶

OBJACK (Object Acknowledge)¶

Value	Description
0	Success
1	Invalid object type
2	Object not found
3	Invalid attribute
4	Read-only attribute
5	Invalid format

ACKA (Acknowledge A)¶

Value	Description
0	Success
1	Failure