Stream 1 - Equipment Status¶

Overview¶

Stream 1 messages handle equipment status requests, online/offline control, and communication establishment. These are fundamental messages for Host-Equipment communication.

Message Summary¶

Message	Name	Direction	W-Bit	Description
S1F1/F2	Are You There	H↔E	W	Communication verification
S1F3/F4	Selected Equipment Status	H→E	W	Request specific SV values
S1F11/F12	Status Variable Namelist	H→E	W	Request SV definitions
S1F13/F14	Establish Communications	H↔E	W	Establish SECS-II link
S1F15/F16	Request Off-Line	H→E	W	Transition to offline
S1F17/F18	Request On-Line	H→E	W	Transition to online

S1F1 - Are You There Request¶

Property	Value
Direction	H↔E (Bidirectional)
Reply	S1F2
W-Bit	Required
Multi-Block	No

Message Structure¶

S1F1 W
  <L[0]>
.

Data Items¶

No data items - Empty list

Description¶

Used to verify that the communication partner is responding. This message is commonly used as: - Communication heartbeat/keepalive - Initial connectivity test after HSMS establishment - Recovery check after communication timeout

Implementation Notes¶

Timing Requirements

Equipment must reply with S1F2 within T3 timeout (typically 45 seconds)
Recommended heartbeat interval: 30-60 seconds
Missing reply should trigger communication recovery

S1F2 - On Line Data (Reply)¶

Property	Value
Direction	H↔E (Bidirectional)
Reply To	S1F1
W-Bit	Not Required
Multi-Block	No

Message Structure¶

S1F2
  <L[2]
    <MDLN>                    // Equipment Model Type
    <SOFTREV>                 // Software Revision Code
  >
.

Data Items¶

Item	Format	Length	Description
MDLN	A	1-20	Equipment model type identifier
SOFTREV	A	1-20	Equipment software revision

Example¶

S1F2
  <L[2]
    <A[12] "GST-PNL-2000">    // Model: Panel Display Equipment
    <A[8] "V2.1.045">         // Software Version
  >
.

Zero-Length Reply¶

If equipment cannot provide model information:

S1F2
  <L[0]>
.

S1F3 - Selected Equipment Status Request¶

Property	Value
Direction	H→E
Reply	S1F4
W-Bit	Required
Multi-Block	Possible (many SVIDs)

Message Structure¶

S1F3 W
  <L[n]                       // n = number of requested SVs
    <SVID>                    // Status Variable ID 1
    <SVID>                    // Status Variable ID 2
    ...
    <SVID>                    // Status Variable ID n
  >
.

Data Items¶

Item	Format	Length	Description
SVID	U1/U2/U4/U8	1/2/4/8	Status Variable ID

Request All SVs¶

Empty list requests all defined status variables:

S1F3 W
  <L[0]>
.

Example - Specific SVs¶

S1F3 W
  <L[8]
    <U4 1>                    // Clock
    <U4 2>                    // ControlState
    <U4 3>                    // ProcessState
    <U4 100>                  // EquipmentTemp
    <U4 101>                  // ChamberPressure
    <U4 102>                  // GasFlow
    <U4 200>                  // WaferCount
    <U4 201>                  // CurrentRecipe
  >
.

S1F4 - Selected Equipment Status Data (Reply)¶

Property	Value
Direction	E→H
Reply To	S1F3
W-Bit	Not Required
Multi-Block	Possible

Message Structure¶

S1F4
  <L[n]                       // Same n as request
    <SV>                      // Value for SVID 1
    <SV>                      // Value for SVID 2
    ...
    <SV>                      // Value for SVID n
  >
.

Data Items¶

Item	Format	Length	Description
SV	varies	varies	Status Variable value (type depends on SV definition)

Example Response¶

S1F4
  <L[8]
    <A[14] "20250101120000">  // Clock (YYYYMMDDHHmmss)
    <U1 5>                    // ControlState = ONLINE-REMOTE
    <U1 1>                    // ProcessState = IDLE
    <F4 23.5>                 // EquipmentTemp = 23.5°C
    <F4 760.2>                // ChamberPressure = 760.2 Torr
    <F4 100.0>                // GasFlow = 100.0 sccm
    <U4 1250>                 // WaferCount = 1250
    <A[20] "RECIPE_PROD_001"> // CurrentRecipe
  >
.

Error Handling¶

If SVID is not found, return empty item at that position:

S1F4
  <L[3]
    <A[14] "20250101120000">  // SVID 1: valid
    <L[0]>                    // SVID 2: not found (empty)
    <U1 1>                    // SVID 3: valid
  >
.

S1F11 - Status Variable Namelist Request¶

Property	Value
Direction	H→E
Reply	S1F12
W-Bit	Required
Multi-Block	Possible

Message Structure¶

S1F11 W
  <L[n]
    <SVID>                    // SVID to query
    ...
  >
.

Request All SV Definitions¶

S1F11 W
  <L[0]>                      // Empty = request all
.

Example - Specific SVIDs¶

S1F11 W
  <L[4]
    <U4 1>                    // Clock
    <U4 2>                    // ControlState
    <U4 100>                  // Temperature
    <U4 200>                  // WaferCount
  >
.

S1F12 - Status Variable Namelist Reply¶

Property	Value
Direction	E→H
Reply To	S1F11
W-Bit	Not Required
Multi-Block	Yes (typically)

Message Structure¶

S1F12
  <L[n]
    <L[3]
      <SVID>                  // Status Variable ID
      <SVNAME>                // Status Variable Name
      <UNITS>                 // Units of measure
    >
    ...
  >
.

Data Items¶

Item	Format	Length	Description
SVID	U1/U2/U4/U8	1/2/4/8	Status Variable ID
SVNAME	A	1-40	Status Variable Name
UNITS	A	0-20	Units of measurement (empty if N/A)

Example Response¶

S1F12
  <L[10]
    <L[3]
      <U4 1>
      <A[5] "Clock">
      <A[0] "">
    >
    <L[3]
      <U4 2>
      <A[12] "ControlState">
      <A[0] "">
    >
    <L[3]
      <U4 3>
      <A[12] "ProcessState">
      <A[0] "">
    >
    <L[3]
      <U4 100>
      <A[15] "EquipmentTemp">
      <A[4] "degC">
    >
    <L[3]
      <U4 101>
      <A[15] "ChamberPressure">
      <A[4] "Torr">
    >
    <L[3]
      <U4 102>
      <A[7] "GasFlow">
      <A[4] "sccm">
    >
    <L[3]
      <U4 200>
      <A[10] "WaferCount">
      <A[3] "pcs">
    >
    <L[3]
      <U4 201>
      <A[13] "CurrentRecipe">
      <A[0] "">
    >
    <L[3]
      <U4 202>
      <A[12] "ProcessTime">
      <A[3] "sec">
    >
    <L[3]
      <U4 203>
      <A[10] "LotID">
      <A[0] "">
    >
  >
.

S1F13 - Establish Communications Request¶

Property	Value
Direction	H↔E (Bidirectional)
Reply	S1F14
W-Bit	Required
Multi-Block	No

Message Structure¶

S1F13 W
  <L[0]>
.

Description¶

The first SECS-II message exchanged after HSMS connection is established. Either Host or Equipment can initiate.

Communication Flow¶

sequenceDiagram participant H as Host participant E as Equipment Note over H,E: HSMS Connection Established H->>E: S1F13 W (Establish Comm Request) E-->>H: S1F14 (COMMACK=0, Accepted) Note over H,E: SECS-II Communication Established H->>E: S1F17 W (Request Online) E-->>H: S1F18 (ONLACK=0, Accepted) Note over H,E: Equipment ONLINE

Implementation Notes¶

Critical Message

Must be the first SECS-II message after HSMS Select.req/rsp
Both Host and Equipment should be prepared to receive S1F13
Should retry if no response within T3 timeout

S1F14 - Establish Communications Acknowledge¶

Property	Value
Direction	H↔E (Bidirectional)
Reply To	S1F13
W-Bit	Not Required
Multi-Block	No

Message Structure¶

S1F14
  <L[2]
    <COMMACK>                 // Communication Acknowledge Code
    <L[2]
      <MDLN>                  // Equipment Model Type
      <SOFTREV>               // Software Revision
    >
  >
.

Data Items¶

Item	Format	Length	Description
COMMACK	B	1	Communication acknowledge code
MDLN	A	1-20	Equipment model type
SOFTREV	A	1-20	Software revision

COMMACK Values¶

Value	Name	Description
0x00	OK	Communication accepted
0x01	DENIED	Denied, communication not ready
0x02	BUSY	Already in communication with another host

Example - Accepted¶

S1F14
  <L[2]
    <B[1] 0x00>               // COMMACK = Accepted
    <L[2]
      <A[12] "GST-PNL-2000">  // Model
      <A[8] "V2.1.045">       // Version
    >
  >
.

Example - Denied¶

S1F14
  <L[2]
    <B[1] 0x01>               // COMMACK = Denied
    <L[2]
      <A[0] "">               // No model info when denied
      <A[0] "">
    >
  >
.

S1F15 - Request Off-Line¶

Property	Value
Direction	H→E
Reply	S1F16
W-Bit	Required
Multi-Block	No

Message Structure¶

S1F15 W
  <L[0]>
.

Description¶

Host requests equipment to transition from ONLINE to OFFLINE state.

State Transition¶

ONLINE-LOCAL ──┐
               ├──► S1F15 ──► OFFLINE
ONLINE-REMOTE ─┘

S1F16 - Off-Line Acknowledge¶

Property	Value
Direction	E→H
Reply To	S1F15
W-Bit	Not Required
Multi-Block	No

Message Structure¶

S1F16
  <OFLACK>
.

Data Items¶

Item	Format	Length	Description
OFLACK	B	1	Off-line acknowledge code

OFLACK Values¶

Value	Name	Description
0x00	OK	Offline transition accepted

Example¶

S1F16
  <B[1] 0x00>                 // OFLACK = Accepted
.

S1F17 - Request On-Line¶

Property	Value
Direction	H→E
Reply	S1F18
W-Bit	Required
Multi-Block	No

Message Structure¶

S1F17 W
  <L[0]>
.

Description¶

Host requests equipment to transition from OFFLINE to ONLINE state. Equipment transitions to ONLINE-REMOTE if accepted.

State Transition¶

OFFLINE ──► S1F17 ──► ONLINE-REMOTE

S1F18 - On-Line Acknowledge¶

Property	Value
Direction	E→H
Reply To	S1F17
W-Bit	Not Required
Multi-Block	No

Message Structure¶

S1F18
  <ONLACK>
.

Data Items¶

Item	Format	Length	Description
ONLACK	B	1	On-line acknowledge code

ONLACK Values¶

Value	Name	Description
0x00	OK	Online transition accepted
0x01	ALREADY	Equipment already online
0x02	NOT_READY	Equipment not ready (interlock, maintenance)

Example - Accepted¶

S1F18
  <B[1] 0x00>                 // ONLACK = Accepted
.

Example - Not Ready¶

S1F18
  <B[1] 0x02>                 // ONLACK = Not Ready
.

Error Scenarios¶

Scenario	ONLACK	Action
Normal transition	0x00	Equipment now ONLINE-REMOTE
Already online	0x01	No state change
Maintenance mode	0x02	Clear maintenance first
Safety interlock	0x02	Resolve interlock first

Implementation Checklist¶

Feature	Required	Notes
S1F1/F2 Support	✓	Heartbeat verification
S1F3/F4 Support	✓	Status variable request
S1F11/F12 Support	✓	SV definition query
S1F13/F14 Support	✓	Communication establishment
S1F15/F16 Support	✓	Offline transition
S1F17/F18 Support	✓	Online transition
Multi-block S1F4	○	When many SVs requested
T3 Timeout Handling	✓	Reply timeout
COMMACK Error Handling	✓	Communication denial
ONLACK Error Handling	✓	Online rejection

S2F13/F14 - Equipment Constant Request
S6F11/F12 - Event Report Send
S5F1/F2 - Alarm Report Send

Stream 1 - Equipment Status¶

Overview¶

Message Summary¶

S1F1 - Are You There Request¶

Message Structure¶

Data Items¶

Description¶

Implementation Notes¶

S1F2 - On Line Data (Reply)¶

Message Structure¶

Data Items¶

Example¶

Zero-Length Reply¶

S1F3 - Selected Equipment Status Request¶

Message Structure¶

Data Items¶

Request All SVs¶

Example - Specific SVs¶

S1F4 - Selected Equipment Status Data (Reply)¶

Message Structure¶

Data Items¶

Example Response¶

Error Handling¶

S1F11 - Status Variable Namelist Request¶

Message Structure¶

Request All SV Definitions¶

Example - Specific SVIDs¶

S1F12 - Status Variable Namelist Reply¶

Message Structure¶

Data Items¶

Example Response¶

S1F13 - Establish Communications Request¶

Message Structure¶

Description¶

Communication Flow¶

Implementation Notes¶

S1F14 - Establish Communications Acknowledge¶

Message Structure¶

Data Items¶

COMMACK Values¶

Example - Accepted¶

Example - Denied¶

S1F15 - Request Off-Line¶

Message Structure¶

Description¶

State Transition¶

S1F16 - Off-Line Acknowledge¶

Message Structure¶

Data Items¶

OFLACK Values¶

Example¶

S1F17 - Request On-Line¶

Message Structure¶

Description¶

State Transition¶

S1F18 - On-Line Acknowledge¶

Message Structure¶

Data Items¶

ONLACK Values¶

Example - Accepted¶

Example - Not Ready¶

Error Scenarios¶

Implementation Checklist¶

Related Messages¶