情境：製程完成¶

1. 概述¶

本情境描述設備完成加工時的完整事件報告流程，包括資料收集和狀態轉換。

2. 前置條件¶

條件	必要狀態
通訊	COMMUNICATING
控制狀態	ONLINE
製程狀態	EXECUTING

3. 完整製程流程¶

sequenceDiagram participant Host participant Equipment rect rgb(240, 255, 240) Note over Host,Equipment: 製程執行 Note over Equipment: 狀態：EXECUTING Note over Equipment: 加工材料中... end rect rgb(255, 248, 240) Note over Host,Equipment: 製程完成 Note over Equipment: 製程步驟完成 Note over Equipment: 狀態：IDLE end rect rgb(240, 248, 255) Note over Host,Equipment: 事件報告 Equipment->>Host: S6F11 W (ProcessCompleted) Note right of Equipment: ProcessStateChange ProcessResult ProcessData Host-->>Equipment: S6F12 (ACKC6=0) end

4. 詳細序列¶

4.1 正常製程完成¶

sequenceDiagram participant Host participant Equipment Note over Equipment: 狀態：EXECUTING Note over Equipment: 最後製程步驟... Note over Equipment: 收集量測資料 Note over Equipment: 狀態：IDLE Equipment->>Host: S6F11 W (CEID=102) Note right of Equipment: DATAID=12345 CEID=102 (ProcessCompleted) Reports: ProcessEnd, ProcessData Host-->>Equipment: S6F12 (ACKC6=0) Note over Host,Equipment: 額外資料收集（選擇性） Host->>Equipment: S6F15 W (Request detailed data) Equipment-->>Host: S6F16 (Detailed process data)

4.2 S6F11 訊息結構¶

S6F11 W
<L[3]
  <DATAID 12345>
  <CEID 102>              // ProcessCompleted
  <L[2]
    <L[2]
      <RPTID 12>          // RPT_ProcessEnd
      <L[6]
        <PPID "RECIPE001">
        <LOTID "LOT001">
        <SLOTID 5>
        <ProcessTime 120>  // 秒
        <ProcessResult 0>  // 0=OK, 1=NG
        <Clock "20241231120000">
      >
    >
    <L[2]
      <RPTID 50>          // RPT_ProcessData
      <L[n]
        // 製程量測資料
        <Measurement1 123.45>
        <Measurement2 67.89>
        ...
      >
    >
  >
>

5. 製程結果碼¶

ProcessResult	說明
0	製程成功完成
1	製程完成但有錯誤
2	製程未完成
3	製程已中止

6. 資料收集¶

6.1 自動資料（透過事件報告）¶

ProcessCompleted 事件中自動包含的資料：

變數	類型	說明
RecipeID	A	使用的配方
LotID	A	批次識別碼
SlotID	U2	卡槽編號
ProcessTime	U4	持續時間（秒）
ProcessResult	U1	結果碼
StartTime	A	製程開始時間
EndTime	A	製程結束時間

6.2 量測資料¶

變數	類型	單位	說明
`[Measurement1]`	F4	`[unit]`	`[Description]`
`[Measurement2]`	F4	`[unit]`	`[Description]`

6.3 隨選資料查詢¶

主機可在完成後請求額外資料：

sequenceDiagram participant Host participant Equipment Host->>Equipment: S6F15 W Note right of Host: 請求特定 DVID 的資料 Equipment-->>Host: S6F16 (Data values)

7. 多單元加工¶

適用於加工多個單元（如晶圓）的設備：

7.1 單元完成¶

sequenceDiagram participant Host participant Equipment Note over Equipment: 加工 Slot 1 Equipment->>Host: S6F11 W (SlotCompleted) Note right of Equipment: CEID=110, Slot=1, Result=OK Host-->>Equipment: S6F12 Note over Equipment: 加工 Slot 2 Equipment->>Host: S6F11 W (SlotCompleted) Note right of Equipment: CEID=110, Slot=2, Result=OK Host-->>Equipment: S6F12 Note over Equipment: 所有卡槽完成 Equipment->>Host: S6F11 W (ProcessCompleted) Note right of Equipment: CEID=102, 彙總資料 Host-->>Equipment: S6F12

7.2 彙總報告結構¶

S6F11 W
<L[3]
  <DATAID>
  <CEID 102>
  <L[1]
    <L[2]
      <RPTID 99>          // RPT_BatchSummary
      <L[3]
        <TotalProcessed 25>
        <TotalPassed 24>
        <TotalFailed 1>
      >
    >
  >
>

8. 錯誤情境¶

8.1 製程完成但有錯誤¶

sequenceDiagram participant Host participant Equipment Note over Equipment: 偵測到製程錯誤 Equipment->>Host: S5F1 W (Alarm Set) Note right of Equipment: ALID=3001 ALTX="Process Error" Host-->>Equipment: S5F2 Note over Equipment: 製程繼續/恢復 Note over Equipment: 狀態：IDLE Equipment->>Host: S6F11 W (ProcessCompleted) Note right of Equipment: ProcessResult=1（有錯誤） Host-->>Equipment: S6F12

8.2 製程中止¶

sequenceDiagram participant Host participant Equipment Note over Equipment: 觸發中止 Note over Equipment: 狀態：ABORTING Equipment->>Host: S6F11 W (ProcessStateChange) Host-->>Equipment: S6F12 Note over Equipment: 狀態：IDLE Equipment->>Host: S6F11 W (ProcessAborted) Note right of Equipment: CEID=103 AbortReason="操作員請求" Host-->>Equipment: S6F12

9. 主機確認失敗¶

9.1 無 S6F12 回應¶

sequenceDiagram participant Host participant Equipment Equipment->>Host: S6F11 W (ProcessCompleted) Note over Equipment: 等待 S6F12 Note over Equipment: T3 逾時 Note over Equipment: 訊息排入重試佇列 Note over Equipment: 或在通訊中斷時 Spool

9.2 Spooling 情境¶

若事件報告期間通訊中斷：

sequenceDiagram participant Host participant Equipment Equipment->>Host: S6F11 W (ProcessCompleted) Note over Host,Equipment: 通訊中斷 Note over Equipment: Spool 訊息 Note over Host,Equipment: 稍後：通訊恢復 Equipment->>Host: S6F23 (Request spool transmit) Host-->>Equipment: S6F24 (Grant) Equipment->>Host: S6F11 (Spooled message) Host-->>Equipment: S6F12

10. 相關收集事件¶

CEID	名稱	觸發條件
100	ProcessStateChange	任何製程狀態變更
101	ProcessStarted	製程執行開始
102	ProcessCompleted	製程正常完成
103	ProcessAborted	製程中止
110	SlotCompleted	單一卡槽/單元完成
111	SlotFailed	單一卡槽/單元失敗

11. 時間考量¶

事件	時機
ProcessCompleted 事件	狀態轉為 IDLE 後立即
量測資料可用	事件發生時
歷史資料保留	`[可設定]`