載具狀態模型（SEMI E87）¶

1. 概述¶

載具狀態模型定義了載具（FOUP）在設備內的生命週期，從到達到離開，依據 SEMI E87（載具管理系統 - CMS）規範。

2. 載具狀態圖¶

stateDiagram-v2 [*] --> NOT_INSTANTIATED NOT_INSTANTIATED --> ID_NOT_READ: 載具到達 LP ID_NOT_READ --> ID_VERIFICATION_OK: ID 讀取成功 ID_NOT_READ --> ID_VERIFICATION_FAILED: ID 讀取失敗 ID_VERIFICATION_FAILED --> ID_NOT_READ: 重試讀取 ID_VERIFICATION_FAILED --> NOT_INSTANTIATED: 載具移除 state IN_ACCESS_STATES { ID_VERIFICATION_OK --> NOT_ACCESSED: 等待存取 NOT_ACCESSED --> IN_ACCESS: 存取已授權 IN_ACCESS --> CARRIER_COMPLETE: 處理完成 CARRIER_COMPLETE --> NOT_ACCESSED: 準備卸載 } IN_ACCESS --> NOT_ACCESSED: 存取取消 NOT_ACCESSED --> ID_VERIFICATION_OK: 需要重新驗證 CARRIER_COMPLETE --> NOT_INSTANTIATED: 載具移除 NOT_ACCESSED --> NOT_INSTANTIATED: 載具移除

3. 狀態定義¶

狀態	說明
NOT_INSTANTIATED	裝載埠無載具
ID_NOT_READ	載具存在，ID 尚未讀取
ID_VERIFICATION_OK	載具 ID 成功讀取並驗證
ID_VERIFICATION_FAILED	載具 ID 讀取失敗或驗證錯誤
NOT_ACCESSED	載具已驗證，目前未被存取
IN_ACCESS	載具門開啟，基板可存取
CARRIER_COMPLETE	所有處理完成，準備卸載

4. 轉換表¶

#	原狀態	觸發條件	目標狀態	動作
1	NOT_INSTANTIATED	載具放置於 LP	ID_NOT_READ	啟動 ID 讀取
2	ID_NOT_READ	ID 讀取成功	ID_VERIFICATION_OK	儲存載具資訊
3	ID_NOT_READ	ID 讀取失敗	ID_VERIFICATION_FAILED	報告錯誤
4	ID_VERIFICATION_FAILED	重試 ID 讀取	ID_NOT_READ	再次嘗試讀取
5	ID_VERIFICATION_FAILED	載具移除	NOT_INSTANTIATED	清除載具資料
6	ID_VERIFICATION_OK	等待存取	NOT_ACCESSED	載具就緒
7	NOT_ACCESSED	存取命令	IN_ACCESS	開門、夾持
8	IN_ACCESS	處理完成	CARRIER_COMPLETE	設定完成旗標
9	IN_ACCESS	取消存取	NOT_ACCESSED	關門
10	CARRIER_COMPLETE	卸載命令	NOT_ACCESSED	準備移除
11	NOT_ACCESSED	載具移除	NOT_INSTANTIATED	清除載具資料
12	CARRIER_COMPLETE	載具移除	NOT_INSTANTIATED	清除載具資料

5. 載具屬性¶

屬性	類型	說明
CarrierID	A	唯一載具識別碼（來自 RFID/條碼）
CarrierType	A	載具類型（FOUP、FOSB 等）
LocationID	A	目前裝載埠 ID
ContentMap	L	基板存在映射
SlotCount	U1	載具中的卡槽數量
CarrierState	U1	目前狀態值
AccessMode	U1	目前存取模式

5.1 載具狀態值¶

值	狀態
0	NOT_INSTANTIATED
1	ID_NOT_READ
2	ID_VERIFICATION_OK
3	ID_VERIFICATION_FAILED
4	NOT_ACCESSED
5	IN_ACCESS
6	CARRIER_COMPLETE

6. 相關訊息¶

訊息	方向	說明
S3F17	H→E	載具動作請求（綁定/取消綁定/處理取消）
S3F18	E→H	載具動作確認
S3F25	H→E	載具 ID 讀取/驗證
S3F26	E→H	載具 ID 讀取/驗證確認
S3F27	E→H	載具 ID 讀取報告
S3F28	H→E	載具 ID 讀取報告確認

6.1 S3F17 - 載具動作請求¶

結構：

S3F17 W
<L[5]
  <DATAID>
  <CARRIERACTION>      // 1=Bind, 2=CancelBind, 3=ProceedWithCarrier, 4=CancelCarrier
  <CARRIERID>
  <PORTID>             // PTN（埠號）
  <L[n]                // 額外屬性
    <L[2]
      <ATTRID>
      <ATTRDATA>
    >
    ...
  >
>

CARRIERACTION 值：

值	動作	說明
1	BIND	將載具 ID 與位置關聯
2	CANCEL_BIND	移除載具關聯
3	PROCEED_WITH_CARRIER	允許繼續處理
4	CANCEL_CARRIER_AT_PORT	取消載具操作
5	CANCEL_CARRIER_NOTIFICATION	取消載具通知

6.2 S3F18 - 載具動作確認¶

結構：

S3F18
<L[2]
  <CAESSION>           // 載具動作結果
  <L[n]                // 每屬性狀態
    <L[2]
      <ATTRID>
      <ATTRDATA>
    >
    ...
  >
>

7. 載具 ID 驗證¶

7.1 ID 讀取序列¶

sequenceDiagram participant Host participant Equipment Note over Equipment: 載具放置於 LP Equipment->>Host: S3F27 (Carrier ID Read Report) Note right of Equipment: CarrierID="FOUP001"<br/>Status=Success Host-->>Equipment: S3F28 (Acknowledge) Note over Equipment: 狀態：ID_VERIFICATION_OK Equipment->>Host: S6F11 (CarrierStateChange) Host-->>Equipment: S6F12

7.2 ID 驗證失敗¶

sequenceDiagram participant Host participant Equipment Note over Equipment: ID 讀取失敗 Equipment->>Host: S3F27 (Carrier ID Read Report) Note right of Equipment: Status=Failed Host-->>Equipment: S3F28 Note over Equipment: 狀態：ID_VERIFICATION_FAILED opt 主機提供 ID Host->>Equipment: S3F17 (BIND, CarrierID) Equipment-->>Host: S3F18 (Success) Note over Equipment: 狀態：ID_VERIFICATION_OK end

8. 內容映射（卡槽映射）¶

載具內容映射指示每個卡槽中基板的存在狀態。

8.1 卡槽映射值¶

值	說明
0	空卡槽
1	基板存在
2	雙重插槽
3	交叉插槽
4	未知

8.2 卡槽映射讀取（S12F9/F10）¶

sequenceDiagram participant Host participant Equipment Host->>Equipment: S12F9 W (Request slot map) Equipment-->>Host: S12F10 (Slot map data) Note left of Equipment: SlotMap=[1,1,1,0,0,1,0,...]

9. 相關收集事件¶

CEID	名稱	說明
`[8001]`	CarrierArrived	載具放置於裝載埠
`[8002]`	CarrierRemoved	載具從裝載埠移除
`[8003]`	CarrierIDRead	載具 ID 成功讀取
`[8004]`	CarrierIDReadFailed	載具 ID 讀取失敗
`[8005]`	CarrierStateChange	載具狀態轉換
`[8006]`	CarrierAccessing	載具進入 IN_ACCESS
`[8007]`	CarrierComplete	所有基板處理完成

10. 相關警報¶

ALID	ALTX	類別	說明
`[8001]`	Carrier ID Read Error	警告	無法讀取載具 ID
`[8002]`	Carrier Verify Error	警告	載具 ID 不符
`[8003]`	Carrier Map Error	警告	卡槽映射讀取錯誤

11. 完整載具生命週期¶

sequenceDiagram participant Host participant Equipment participant AMHS AMHS->>Equipment: 送達 FOUP 至 LP1 Note over Equipment: 狀態：ID_NOT_READ Equipment->>Host: S3F27 (CarrierID="FOUP001") Host-->>Equipment: S3F28 Note over Equipment: 狀態：ID_VERIFICATION_OK Equipment->>Host: S6F11 (CarrierIDRead) Host-->>Equipment: S6F12 Note over Equipment: 狀態：NOT_ACCESSED Host->>Equipment: S3F17 (PROCEED_WITH_CARRIER) Equipment-->>Host: S3F18 Note over Equipment: 狀態：IN_ACCESS Note over Equipment: 處理基板中... Note over Equipment: 狀態：CARRIER_COMPLETE Equipment->>Host: S6F11 (CarrierComplete) Host-->>Equipment: S6F12 Host->>Equipment: S3F17 (Carrier Action - unload) Equipment-->>Host: S3F18 Equipment->>AMHS: 請求取回 AMHS->>Equipment: 移除 FOUP Note over Equipment: 狀態：NOT_INSTANTIATED