裝載埠狀態模型（SEMI E87）¶

1. 概述¶

裝載埠狀態模型定義了每個裝載埠（載具裝載位置）的操作狀態，依據 SEMI E87 規範。

2. 裝載埠傳輸狀態圖¶

stateDiagram-v2 [*] --> OUT_OF_SERVICE OUT_OF_SERVICE --> IN_SERVICE: 服務啟用 IN_SERVICE --> OUT_OF_SERVICE: 服務停用 state IN_SERVICE { [*] --> TRANSFER_READY TRANSFER_READY --> TRANSFER_BLOCKED: 封鎖命令 TRANSFER_BLOCKED --> TRANSFER_READY: 解除封鎖命令 TRANSFER_READY --> READY_TO_LOAD: 裝載請求 READY_TO_LOAD --> TRANSFER_READY: 取消 / 逾時 READY_TO_LOAD --> TRANSFER_READY: 裝載完成 TRANSFER_READY --> READY_TO_UNLOAD: 卸載請求 READY_TO_UNLOAD --> TRANSFER_READY: 取消 / 逾時 READY_TO_UNLOAD --> TRANSFER_READY: 卸載完成 }

3. 裝載埠關聯狀態圖¶

stateDiagram-v2 [*] --> NOT_ASSOCIATED NOT_ASSOCIATED --> ASSOCIATED: 載具放置並驗證 ASSOCIATED --> NOT_ASSOCIATED: 載具移除

4. 狀態定義¶

4.1 傳輸狀態¶

狀態	說明
OUT_OF_SERVICE	裝載埠停用，不允許傳輸
IN_SERVICE	裝載埠啟用
TRANSFER_BLOCKED	傳輸暫時封鎖
TRANSFER_READY	準備進行裝載/卸載操作
READY_TO_LOAD	等待載具裝載
READY_TO_UNLOAD	等待載具卸載

4.2 關聯狀態¶

狀態	說明
NOT_ASSOCIATED	無載具與裝載埠關聯
ASSOCIATED	載具與裝載埠關聯

5. 轉換表¶

#	原狀態	觸發條件	目標狀態	動作
1	OUT_OF_SERVICE	啟用命令	IN_SERVICE / TRANSFER_READY	初始化 LP
2	IN_SERVICE	停用命令	OUT_OF_SERVICE	拒絕操作
3	TRANSFER_READY	封鎖傳輸	TRANSFER_BLOCKED	封鎖傳輸
4	TRANSFER_BLOCKED	解除封鎖傳輸	TRANSFER_READY	允許傳輸
5	TRANSFER_READY	裝載請求	READY_TO_LOAD	通知 AMHS
6	READY_TO_LOAD	載具到達	TRANSFER_READY	處理載具
7	READY_TO_LOAD	逾時/取消	TRANSFER_READY	取消請求
8	TRANSFER_READY	卸載請求	READY_TO_UNLOAD	通知 AMHS
9	READY_TO_UNLOAD	載具移除	TRANSFER_READY	清除 LP
10	READY_TO_UNLOAD	逾時/取消	TRANSFER_READY	取消請求

6. 裝載埠屬性¶

屬性	類型	說明
PortID	U2	裝載埠編號（1、2、...）
TransferState	U1	目前傳輸狀態
AssociationState	U1	目前關聯狀態
AccessMode	U1	目前存取模式（見存取模式章節）
CarrierID	A	關聯的載具 ID（若有）
ReservationState	U1	主機/設備預約狀態

6.1 傳輸狀態值¶

值	狀態
0	OUT_OF_SERVICE
1	TRANSFER_BLOCKED
2	TRANSFER_READY
3	READY_TO_LOAD
4	READY_TO_UNLOAD

6.2 關聯狀態值¶

值	狀態
0	NOT_ASSOCIATED
1	ASSOCIATED

7. 裝載埠命令¶

7.1 服務控制¶

命令	效果
EnableLoadPort	OUT_OF_SERVICE → IN_SERVICE
DisableLoadPort	任意 → OUT_OF_SERVICE

7.2 傳輸控制¶

命令	效果
BlockTransfer	TRANSFER_READY → TRANSFER_BLOCKED
UnblockTransfer	TRANSFER_BLOCKED → TRANSFER_READY
RequestLoad	TRANSFER_READY → READY_TO_LOAD
RequestUnload	TRANSFER_READY → READY_TO_UNLOAD
CancelRequest	READY_TO_LOAD/UNLOAD → TRANSFER_READY

8. 相關訊息¶

訊息	方向	說明
S3F23	H→E	埠動作請求
S3F24	E→H	埠動作確認

8.1 S3F23 - 埠動作請求¶

結構：

S3F23 W
<L[3]
  <DATAID>
  <PORTACTION>         // 動作碼
  <L[n]                // 埠清單
    <PORTID>
    ...
  >
>

PORTACTION 值：

值	動作
1	預約埠
2	取消預約
3	載具出請求
4	載具入請求
5	取消載具出
6	取消載具入

8.2 S3F24 - 埠動作確認¶

結構：

S3F24
<L[2]
  <PORTACTIONRESULT>
  <L[n]                // 每埠結果
    <L[2]
      <PORTID>
      <PORTRESULT>
    >
    ...
  >
>

9. 裝載序列¶

sequenceDiagram participant Host participant Equipment participant AMHS Note over Equipment: LP1：TRANSFER_READY Host->>Equipment: S3F23 (RequestLoad, Port=1) Equipment-->>Host: S3F24 (Success) Note over Equipment: LP1：READY_TO_LOAD Equipment->>Host: S6F11 (LoadPortStateChange) Host-->>Equipment: S6F12 Equipment->>AMHS: 裝載請求訊號 AMHS->>Equipment: 載具送達 Note over Equipment: LP1：TRANSFER_READY Note over Equipment: LP1：ASSOCIATED Equipment->>Host: S6F11 (CarrierArrived) Host-->>Equipment: S6F12

10. 卸載序列¶

sequenceDiagram participant Host participant Equipment participant AMHS Note over Equipment: LP1：TRANSFER_READY, ASSOCIATED Host->>Equipment: S3F23 (RequestUnload, Port=1) Equipment-->>Host: S3F24 (Success) Note over Equipment: LP1：READY_TO_UNLOAD Equipment->>AMHS: 卸載請求訊號 AMHS->>Equipment: 載具移除 Note over Equipment: LP1：TRANSFER_READY Note over Equipment: LP1：NOT_ASSOCIATED Equipment->>Host: S6F11 (CarrierRemoved) Host-->>Equipment: S6F12

11. 相關收集事件¶

CEID	名稱	說明
`[9001]`	LoadPortStateChange	傳輸狀態變更
`[9002]`	LoadPortAssociated	載具已關聯
`[9003]`	LoadPortDisassociated	載具已移除
`[9004]`	LoadPortReserved	埠已被主機預約
`[9005]`	LoadPortReleased	埠預約已釋放

12. 相關狀態變數¶

SVID	名稱	類型	說明
`[9001]`	LoadPort1TransferState	U1	LP1 傳輸狀態
`[9002]`	LoadPort1AssociationState	U1	LP1 關聯狀態
`[9003]`	LoadPort1CarrierID	A	LP1 載具 ID
`[9010]`	LoadPort2TransferState	U1	LP2 傳輸狀態
...	...	...	...

13. 多埠配置¶

參數	值
裝載埠數量	`[2]`
埠編號	1, 2
每埠載具容量	1 FOUP

14. 錯誤處理¶

錯誤條件	回應
裝載逾時	READY_TO_LOAD → TRANSFER_READY
卸載逾時	READY_TO_UNLOAD → TRANSFER_READY
無效埠	S3F24 含錯誤碼
埠停用中	S3F24 含錯誤碼